Charged-particle detector package for high speed applications
AssigneeASML Netherlands B.V.
InventorYongxin Wang
Life of this patent
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Abstract
A charged particle beam system may include a detector. A package for a detector may have a package body that includes two sets of pins, each of the sets of pins including two pins. Each pin of the sets of pins may be configured to be connected to one of two terminals of a sensing element. Pins of different sets may be configured to be connected to a different one of the two terminals of the diode. The sets of pins may be arranged with a symmetry such that magnetic fields generated when current passes through the sets of pins is reduced due to the symmetry.
Claims19
A package for a charged particle detector comprising:
- a package body that includes two sets of pins, each of the sets of pins including two pins,
- wherein each pin of the sets of pins is configured to be connected to one of two terminals of a diode of the charged particle detector, and pins of different sets are configured to be connected to a different one of the two terminals of the diode,
- and wherein the sets of pins are arranged with a symmetry such that a first magnetic field generated when current passes through a pin of the sets of pins reduces a second magnetic field generated by another pin of the sets due to the symmetry.
A detector package, comprising:
- a body having a plurality of holes formed therein;
- a sensing element;
- and
- a plurality of pins configured to be inserted in the plurality of holes,
- wherein the pins are arranged in a plurality of groups, each of the groups being aligned with a corresponding terminal of the sensing element,
- each group includes a pin connected to a first terminal of the sensing element and a pin connected to a second terminal of the sensing element, and
- pins of a group are arranged alternately with respect to pins of another group.
A charged particle detector system comprising:
- a charged particle detector comprising a diode having two terminals;
- and
- a package body coupled to the charged particle detector, the package body including two sets of pins, each of the sets of pins including two pins,
- wherein each pin of the sets of pins is connected to one of two terminals of the diode, and pins of different sets are connected to a different one of the two terminals of the diode,
- and wherein the sets of pins are arranged with a symmetry such that as first magnetic field generated when current passes through a pin of the sets of pins reduces a second magnetic field generated by another pin of the sets due to the symmetry.
Dependencies are inferred from the claim text.