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US 12,610,463 B2Granted
Copper base substrate comprising an insulating layer having a specific relationship between thickness and elastic modulus
AssigneeMitsubishi Materials Corporation
InventorsFumiaki Ishikawa, Shintaro Hara
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Abstract
A copper base substrate of the present invention, in which a copper substrate, an insulating layer, and a circuit layer, are laminated in an order in the copper substrate, a ratio of a thickness (unit: μm) to an elastic modulus (unit: GPa) at 100° C. is 50 or more in the insulating layer, and the circuit layer has an elastic modulus at 100° C. of 100 GPa or less.
Claims4
A copper base substrate,
- wherein a copper substrate, an insulating layer, and a circuit layer are laminated in an order in the copper base substrate,
- a ratio of a thickness (unit:
- μm) to an elastic modulus (unit:
- GPa) at 100° C. is 50 or more in the insulating layer,
- the circuit layer contains copper and has an elastic modulus at 100° C. of 100 GPa or less,
- the elastic modulus at 100° C. of the circuit layer is measured by dynamic viscoelasticity measurement,
- the circuit layer is thinner than the copper substrate, and
- the elastic modulus of the circuit layer is lower than the elastic modulus of the copper substrate.
5 more elements
Dependencies are inferred from the claim text.