Submillimeter-wave phased arrays for electronic beam scanning

A phased array system, comprising:

• an array of antennas outputting or receiving electromagnetic radiation, wherein the electromagnetic radiation is at one or more submillimeter wavelengths;
• and
• a plurality of waveguides each feeding to a different one of the antennas, the waveguides configured and dimensioned to guide an electromagnetic wave comprising the signals having a frequency in a range of 100 gigahertz (GHz) to 1000 terahertz (THz);
• and
• a plurality of actuators and/or Micro-Electromechanical System (MEMS) devices each comprising or coupled to a dielectric material, each of the MEMS devices or actuators coupled to a different one of the waveguides and configured to move the dielectric material towards or away from the electromagnetic wave to vary one or more phases of the electromagnetic wave guided by different ones of the waveguides relative to one another.

A method of making phased array system, comprising:

• coupling:
• an array of antennas outputting or receiving electromagnetic radiation, wherein the electromagnetic radiation is at one or more submillimeter wavelengths;
• and
• a plurality of waveguides each feeding to a different one of the antennas, the waveguides configured and dimensioned to guide an electromagnetic wave comprising the signals having a frequency in a range of 100 gigahertz (GHz) to 1000 terahertz (THz);
• and
• a plurality of actuators and/or Micro-Electromechanical System (MEMS) devices each comprising or coupled to a dielectric material, each of the MEMS devices or actuators coupled to a different one of the waveguides and configured to move the dielectric material towards or away from the electromagnetic wave to vary one or more phases of the electromagnetic wave guided by different ones of the waveguides relative to one another.