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US 12,609,289 B2Granted
Micro-lens array for metal-channel photomultiplier tube
AssigneeKLA Corporation
InventorsPaul Donders, Derek Mackay
Life of this patent
Estimating the term…
Abstract
The effective quantum efficiency of a metal-channel photomultiplier tube can be increased with an optical system. The optical system can direct incident light from areas of low efficiency on the cathode of the metal-channel photomultiplier tube instead to areas of high efficiency on the cathode. These high-efficiency areas of the cathode can correspond to a position between the dynode structure.
Claims7
A system comprising:
- a metal-channel photomultiplier tube that includes a photocathode, an anode, and a dynode structure with three or more rows of dynodes that extend from the photocathode to the anode, wherein the photocathode of the metal-channel photomultiplier tube has first areas and second areas, wherein the first areas have a higher efficiency than the second areas, wherein the first areas of the photocathode correspond to positions between the rows of the dynodes in the dynode structure, and wherein the first areas are from 15% to 65% of a total area of the metal-channel photomultiplier tube;
- and an optical system positioned in a path of a beam of light directed at the metal-channel photomultiplier tube, wherein the optical system is a micro-lens array that includes a plurality of cylindrical lens elements, and the optical system is configured to direct most of the beam of light at the first areas of the metal-channel photomultiplier tube.
A method comprising:
- generating a beam of light;
- directing the beam of light toward an optical system, wherein the optical system is a micro-lens array that includes a plurality of cylindrical lens elements;
- and directing most of the beam of light onto a plurality of areas of a metal-channel photomultiplier tube with the optical system, wherein the metal-channel photomultiplier tube includes a photocathode, an anode and a dynode structure with three or more rows of dynodes that extend from the photocathode to the anode, wherein the areas have a higher efficiency compared to other areas of the photocathode of the metal-channel photomultiplier tube, wherein the areas of the photocathode correspond to positions between the rows of the dynodes in the dynode structure, and wherein the areas are from 15% to 65% of a total area of the metal-channel photomultiplier tube.
Dependencies are inferred from the claim text.