Control of pulsing frequencies and duty cycles of parameters of RF signals
AssigneeLam Research Corporation
InventorsTom A. Kamp, Yuhou Wang, Michael John Martin
Life of this patent
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AssigneeLam Research Corporation
InventorsTom A. Kamp, Yuhou Wang, Michael John Martin
Estimating the term…
A method for pulsing is described. The method includes generating a first radio frequency (RF) signal, and pulsing a parameter of the first RF signal between a first parameter level and a second parameter level at a pulsing frequency during a cycle of a digital pulsed signal. The method further includes generating a second RF signal, and pulsing a parameter of the second RF signal at a higher pulsing frequency than the pulsing frequency of the parameter of the first RF signal during the cycle. During the cycle, a start time of pulsing the parameter of the first RF signal is synchronized with a start time of pulsing the parameter of the second RF signal and an end time of pulsing the parameter of the first RF signal is synchronized with an end time of pulsing the parameter of the second RF signal.
A method for pulsing, comprising:
Dependencies are inferred from the claim text.