Charged particle beam device
AssigneeHitachi High-Tech Corporation
InventorsMinami Shouji, Yasuhiro Shirasaki, Natsuki Tsuno, Hirohiko Kitsuki, Hiroya Ohta
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Abstract
An object of the invention is to obtain an observation image in which a plurality of pieces of feature data of a sample are emphasized in a charged particle beam device that acquires an observation image of the sample by irradiating the sample with a charged particle beam and light. The charged particle beam device according to the invention calculates a sequence for modulating a light irradiation condition according to an irradiation condition of a charged particle beam, and controls the light irradiation condition according to the sequence (see FIG. 2).
Claims14
A charged particle beam device for irradiating a sample with a charged particle beam, the charged particle beam device comprising:
- a charged particle source configured to irradiate the sample with the charged particle beam;
- a light source configured to emit light with which the sample is irradiated;
- a detector configured to detect secondary charged particles generated from the sample by irradiating the sample with the charged particle beam;
- an image processing unit configured to generate an observation image of the sample based on a secondary charged particle signal obtained from the detector;
- a charged particle control unit configured to control an irradiation condition of the charged particle beam;
- and
- a light control unit configured to control a light irradiation condition, wherein
- the light control unit calculates a sequence for modulating the light irradiation condition according to an irradiation condition of the charged particle beam,
- the light control unit controls the light irradiation condition according to the sequence,
- the light control unit calculates, for each feature data of the sample, the sequence for causing the secondary charged particles in which the feature data of the sample is emphasized to be generated from the sample, and
- the image processing unit generates the observation image in which the feature data of the sample is emphasized by generating the observation image using a detection result of the secondary charged particles generated from the sample according to the sequence calculated for each feature data of the sample by the light control unit.
Dependencies are inferred from the claim text.