Electron microscope, device for measuring electron-photon correlation, and method for measuring electron-photon correlation

A device for measuring electron-photon correlation, comprising:

• an electron detector for detecting electrons radiated from an electron gun of an electron microscope onto a sample;
• a photon detector for detecting photons emitted from the sample when the sample is irradiated with the electrons;
• and
• a computing device that computes, for each of the detected photons, a time difference between the time of irradiation of the sample with the electron and the time of emission of the photon from the sample, based on the time of detection of the electron by the electron detector and the time of detection of the photon by the photon detector, and that computes electron-photon time correlation indicating the distribution of the time difference, wherein
• the computing device includes an identification module that identifies the sample, based on the electron-photon time correlation.

A method for measuring electron-photon correlation, comprising:

• irradiating a sample with electrons;
• detecting the electrons with which the sample is irradiated;
• detecting photons emitted from the sample when the sample is irradiated with the electrons;
• computing, for each of the detected photons, a time difference between the time of irradiation of the sample with the electron and the time of emission of the photon from the sample, based on the time of detection of the electron and the time of detection of the photon, and computing electron-photon time correlation indicating the distribution of the time difference, and
• identifying the sample, based on the electron-photon time correlation.