High voltage power supplies for fast voltage changes
AssigneeAdvanced Energy Industries, Inc.
InventorsArthur Flatt, Gary Byfield
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AssigneeAdvanced Energy Industries, Inc.
InventorsArthur Flatt, Gary Byfield
Estimating the term…
The disclosure describes a high voltage power supply and control system for electron beam tools. The system includes a primary DC source, one or more secondary regulated sources, and a fast power control interposed therebetween. The fast power control includes a transfer capacitor coupled to ground, a first fast power control, and a second fast power control. The first fast power control makes rapid and small adjustments to the total output provided to the secondaries and hence controls small adjustments to the tool, while the second fast power control makes proportional voltage or current changes of an opposing polarity to charge or discharge the transfer capacitor and thereby maintain charge balance relative to cable capacitances of cables connecting the high voltage power source to the tool. The system can be used with electron beam tools such as scanning electron microscopes, electron beam inspection tools, or electron lithography tools.
A high voltage power source comprising:
An electron beam assembly comprising:
A method of driving a tool comprising:
Dependencies are inferred from the claim text.