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US 12,609,228 B2Granted
Electromagnetic device, alignment apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsTakeshi Sato, Shigeo Koya, Nobushige Korenaga
Life of this patent
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Abstract
An electromagnetic device includes a first member having a first end face, a second member having a second end face facing the first end face through an air gap, and a coil wound around one of the first member and the second member. Each of the first member and the second member is formed from a laminated body of a plurality of steel plates, and a magnetic circuit formed from the first member and the second member includes a changing part at which a lamination direction of the laminated body changes at a right angle to generate a magnetic flux along a plane direction of each of the plurality of steel plates.
Claims16
An electromagnetic device comprising:
- a first member having a first end face, a second member having a second end face facing the first end face through an air gap;
- and
- a third member,
- wherein a coil is wound around any of the first member, the second member, and the third member,
- wherein each of first member and the second member is formed from a laminated body of a plurality of steel plates,
- wherein a lamination direction of the plurality of steel plates of a first portion of the first member and a lamination direction of the plurality of steel plates of a second portion of the second member are orthogonal to each other, and the first portion and the second portion face each other through the air gap, and
- wherein the third member is formed from a laminated body of a plurality of steel plates and a lamination direction of the plurality of steel plates of a third portion of the first member and a lamination direction of the plurality of steel plates of a fourth portion of the third member are orthogonal to each other, and the third portion and the fourth portion contact with each other.
4 more elements
An electromagnetic device comprising:
- a first member having a first end face, a second member having a second end face facing the first end face through an air gap, a third member, and a coil wound around third member,
- wherein each of first member, the second member, and the third member is formed from a laminated body of a plurality of steel plates, and
- wherein a lamination direction of the plurality of steel plates of a first portion of the first member and a lamination direction of the plurality of steel plates of a second portion of the third member are orthogonal to each other, and the first portion and the second portion face each other through a solid member.
An electromagnetic device comprising:
- a first member having a first end face, a second member having a second end face facing the first end face through an air gap, and a coil wound around one of the first member and the second member,
- wherein each of first member and the second member is formed from a laminated body of a plurality of steel plates, and
- wherein the first member includes a portion at which the lamination direction of the plurality of steel plates of the first member gradually changes from a first direction to a second direction orthogonal to the first direction.
An electromagnetic device comprising:
- a first member having a first end face, a second member having a second end face facing the first end face through an air gap, and a coil wound around one of the first member and the second member,
- wherein each of first member and the second member is formed from a laminated body of a plurality of steel plate,
- wherein one of the first member and the second member includes at least one stacked iron core,
- the other of the first member and the second member includes a wound iron core including a portion at which a lamination direction of the laminated body of the other of the first member and the second member changes.
1 more element
An electromagnetic device comprising:
- a first member having a first end face, a second member having a second end face facing the first end face through an air gap, and a coil wound around one of the first member and the second member,
- wherein each of first member and the second member is formed from a laminated body of a plurality of steel plate,
- wherein each of the first member and the second member is formed from a wound iron core,
- wherein an axial direction of the wound iron core constituting the first member is orthogonal to an axial direction of the wound iron core constituting the second member,
- wherein the wound iron core of the first member includes a portion at which a lamination direction of the laminated body of the first member changes, and
- wherein the wound iron core of the second member includes a portion at which a lamination direction of the laminated body of the second member changes.
3 more elements
An alignment apparatus that relatively aligns a first object and a second object, the apparatus comprising:
- a first positioning mechanism configured to position the first object;
- and
- a second positioning mechanism configured to position the second object,
- wherein at least one of the first positioning mechanism and the second positioning mechanism includes an electromagnetic device, wherein electromagnetic device comprises a first member having a first end face, a second member having a second end face facing the first end face through an air gap, and a coil wound around one of the first member and the second member,
- wherein each of first member and the second member is formed from a laminated body of a plurality of steel plates, and
- wherein a lamination direction of the plurality of steel plates of a first portion of the first member and a lamination direction of the plurality of steel plates of a second portion of the second member are orthogonal to each other, and the first portion and the second portion face each other through the air gap.
3 more elements
Dependencies are inferred from the claim text.