Position measuring method, method for manufacturing article, position measuring apparatus, semiconductor manufacturing apparatus, and imprint apparatus
AssigneeCanon Kabushiki Kaisha
InventorNozomu Hayashi
Life of this patent
Estimating the term…
Abstract
A position measuring method includes an image capturing element for capturing an image of an alignment mark. The method includes first processing of setting processing areas on the image capturing element for capturing an image of the alignment mark and performing position measurement processing, and second processing of calculating a position of the alignment mark on the basis of the processing areas set in the first processing. The position of the alignment mark is calculated using a plurality of the processing areas set by shifting the processing areas from each other in units of one pixel of the image capturing element.
Claims7
A position measuring method using an image capturing element for capturing an image of an alignment mark comprising a rough detection mark and an accurate detection mark, the method comprising:
- first processing of setting processing areas on the image capturing element for capturing an image of the alignment mark and performing position measurement processing, the processing areas comprising multiple pixels, and a reference point for the alignment mark is set and the processing areas centered on a pixel of the image capturing element closest to the reference point are set;
- and
- second processing of calculating a position of the alignment mark on the basis of the processing areas set in the first processing,
- wherein the position of the alignment mark is calculated using a plurality of the processing areas set by shifting the processing areas from each other in units of one pixel of the image capturing element.
A position measuring apparatus comprising:
- an image capturing element for capturing an image of an alignment mark comprising a rough detection mark and an accurate detection mark;
- and
- at least one processor or circuit configured to function as:
- a processing unit configured to set processing areas on the image capturing element for capturing an image of the alignment mark and performing position measurement processing, and calculate a position of the alignment mark on the basis of the set processing areas, the processing areas comprising multiple pixels, and a reference point for the alignment mark is set, and the processing areas centered on a pixel of the image capturing element closest to the reference point are set,
- wherein the processing unit is further configured to calculate the position of the alignment mark using a plurality of the processing areas set by shifting the processing areas from each other in units of one pixel of the image capturing element.
Dependencies are inferred from the claim text.