Laser interferometer
AssigneeSeiko Epson Corporation
InventorsKohei Yamada, Takeshi Shimizu
Life of this patent
Estimating the term…
Loading patent…
AssigneeSeiko Epson Corporation
InventorsKohei Yamada, Takeshi Shimizu
Estimating the term…
A laser interferometer that includes a light source which emits laser light, an optical divider that divides the laser light into a first optical path and a second optical path, an optical modulator being provided on the first optical path or the second optical path, including an oscillator that oscillates when a current is applied, and modulate the laser light by using the oscillator, a photoreceptor that receives the laser light and output a photoreception signal, the laser light being reflected by an object to be measured that is provided on the first optical path or the second optical path, and a demodulation circuit that demodulates, from the photoreception signal, a Doppler signal derived from the object to be measured, based on a reference signal and a modulation signal derived from the optical modulator.
A laser interferometer, comprising:
Dependencies are inferred from the claim text.