Air-gap encapsulation of nanostructured optical devices
AssigneeApplied Materials, Inc.
InventorsSage Toko Garrett Doshay, Kenichi Ohno, Rutger Meyer Timmerman Thijssen, Russell Chin Yee Teo, Jinrui Guo
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AssigneeApplied Materials, Inc.
InventorsSage Toko Garrett Doshay, Kenichi Ohno, Rutger Meyer Timmerman Thijssen, Russell Chin Yee Teo, Jinrui Guo
Estimating the term…
Embodiments described herein relate to encapsulated optical devices and methods of forming optical devices with controllable air-gapped encapsulation. In one embodiment, a plurality of openings are formed in a support layer surrounding the plurality of optical device structures to create a high refractive index contrast between the optical device structures, the support layer, and the openings. In another embodiment, sacrificial material is disposed in-between the optical device structures and then an encapsulation layer is disposed on the optical device structures. The sacrificial material is removed, forming a space bounded by the encapsulation layer, the substrate, and each of the optical device structures. In yet another embodiment, the encapsulation layer is disposed over the optical device structures forming a space bounded by the encapsulation layer, the substrate, and each of the optical device structures.
An optical device comprising:
An optical device comprising:
Dependencies are inferred from the claim text.