Transparent substrate with anti-reflective film

An anti-reflective film-attached transparent substrate comprising a transparent substrate having two main surfaces and, on at least one of the main surfaces, a multilayer film in which at least two layers having different refractive indices are laminated,

• wherein at least one silicon oxide layer among the layers in the multilayer film has a moisture permeability of 300 g/m2/day or less;
• at least one layer among the layers in the multilayer film is mainly formed of an Si oxide,
• at least another layer among the layers in the multilayer film is mainly formed of a mixed oxide of an oxide comprising at least one element selected from the group A consisting of Mo and W and an oxide comprising at least one element selected from the group B consisting of Si, Nb, Ti, Zr, Ta, Al, Sn, and In,
• a content of the elements of the group B contained in the mixed oxide is less than 80 mass % with respect to a total of the elements of the group A contained in the mixed oxide and the elements of the group B contained in the mixed oxide, and
• an outermost layer of the multilayer film is SiOx, wherein x is less than 2.