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US 12,607,508 B2Granted
Piezoelectric interferometer
AssigneeMurata Manufacturing Co., Ltd.
InventorVille Kaajakari
Life of this patent
Estimating the term…
Abstract
An interferometer is provided that includes a reflection region, a support region and two or more actuation regions. Each of the two or more actuation regions extend from the support region to the reflection region. A first reflector is fixed to the substrate at least in the reflection region. The interferometer includes a piezoelectric layer at least in the two or more actuation regions. Moreover, a second reflector is attached to the piezoelectric layer.
Claims22
An interferometer comprising:
- a substrate having a planar surface that defines a horizontal plane with a vertical direction being perpendicular to the horizontal plane;
- a first reflector on the substrate;
- a second reflector above the first reflector, the second reflector configured to move in the vertical direction by one or more force actuators;
- a spacer that separates the first reflector from the second reflector by a tuning gap in the vertical direction;
- a reflection region;
- a support region;
- two or more actuation regions that include at least one piezoelectric layer and that extend from the support region to the reflection region;
- and
- at least one actuation electrode attached to the at least one piezoelectric layer in at least one actuation region of the two or more actuation regions,
- wherein the first reflector is fixed to the substrate at least in the reflection region, and the second reflector is attached to the at least one piezoelectric layer,
- wherein the second reflector and the at least one actuation electrode in the at least one actuation region are made of a same metal layer, and
- wherein the at least one piezoelectric layer comprises a top aperture in the reflection region, the top aperture in the reflection region causing radiation that undergoes constructive interference in the interferometer to pass through the second reflector and through the interferometer.
9 more elements
An interferometer comprising:
- a substrate having a planar surface;
- a first reflector coupled to the planar surface of the substrate;
- a second reflector disposed above the first reflector and configured to move in a direction away from the substrate by one or more force actuators;
- a spacer that separates the first reflector from the second reflector by a tuning gap;
- and
- at least one piezoelectric layer disposed on the second reflector,
- wherein the interferometer includes a reflection region, a support region, and two or more actuation regions,
- wherein an actuation electrode is attached to the at least one piezoelectric layer in at least one actuation region of the two or more actuation regions,
- wherein the first reflector is attached to the substrate at least in the reflection region, and the second reflector is attached to the at least one piezoelectric layer,
- wherein the second reflector and the actuation electrode in the at least one actuation region are made of a same metal layer, and
- wherein the at least one piezoelectric layer comprises a top aperture in the reflection region, the top aperture in the reflection region causing radiation that undergoes constructive interference in the interferometer to pass through the second reflector and through the interferometer.
8 more elements
A method for manufacturing an interferometer that includes a reflection region and support region, the method comprising:
- depositing a layer of first reflector material on a surface of a substrate;
- depositing a layer of spacer material on the layer of first reflector material;
- depositing a layer of second reflector material on the layer of spacer material;
- placing a layer of piezoelectric material on the layer of second reflector material and patterning the layer of piezoelectric material to form actuation parts in two or more actuation regions on the interferometer, such that each of the two or more actuation regions extend from a support region to a reflection region;
- depositing a layer of electrically conductive electrode material on the layer of piezoelectric material;
- patterning the layer of electrode material to be present at least in the two or more actuation regions;
- and
- removing the layer of spacer material from the reflection region and the two or more actuation regions,
- wherein the layer of second reflector material and the layer of electrode material in the two or more actuation regions are made of a same metal layer, and
- wherein the layer of piezoelectric material is patterned to comprise a top aperture in the reflection region, the top aperture in the reflection region causing radiation that undergoes constructive interference in the interferometer to pass through the interferometer.
7 more elements
Dependencies are inferred from the claim text.