Piezoelectric sensor with reduced process difficulty and manufacturing method therefor, and detection apparatus

A method of manufacturing a piezoelectric sensor, comprising:

• forming an array substrate;
• forming a patterned sacrificial layer on the array substrate;
• forming a first capping layer on the array substrate and around the sacrificial layer, the first capping layer being provided with a first opening around the sacrificial layer;
• etching off the sacrificial layer through the first opening by using a wet etching process, to form a cavity between the first capping layer and the array substrate, in a region where the sacrificial layer is located;
• forming a first electrode that is located above the first capping layer and above the cavity;
• forming a second capping layer that is located at least partially between the first capping layer and the first electrode, wherein the second capping layer completely covers the first capping layer;
• and
• forming a piezoelectric sensing assembly on the first electrode.