Apparatus and methods for verifying alignment between a shadow ring and a substrate
AssigneeApplied Materials, Inc.
InventorsSock Hoon Lim, Ramie Madeja, Wee Teng Fan
Life of this patent
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Abstract
Methods and apparatus for verifying alignment between an opaque shadow ring and a substrate are provided. In some embodiments, the apparatus includes a tool comprising: a transparent ring having an inner edge defining a central opening and an outer edge and having a top side and a bottom side; a gauge mark on or in the transparent ring spaced between the inner edge and the outer edge, the gauge mark extending around the inner edge; and a pin extending from the bottom side of the transparent ring and located between the gauge mark and the outer edge.
Claims20
A tool for verifying alignment between an opaque shadow ring and a substrate, the tool comprising:
- a transparent ring having an inner edge defining a central opening and an outer edge and having a top side and a bottom side;
- a gauge mark on or in the transparent ring spaced between the inner edge and the outer edge, the gauge mark extending around the inner edge;
- and
- a pin extending from the bottom side of the transparent ring and located between the gauge mark and the outer edge.
A method of calibration in a substrate processing system that uses an opaque shadow ring during substrate processing, the method comprising:
- placing a tool over a substrate that is supported by a substrate support of the substrate processing system, and wherein the tool comprises a transparent ring having an inner edge defining a central opening;
- inspecting an outer edge of the substrate through the transparent ring;
- and
- calibrating a substrate transfer robot in response to the inspection.
Dependencies are inferred from the claim text.