Method and device for drying a component interior
AssigneeCarl Zeiss SMT GmbH
InventorsArvid Maczeyzik, Patrick Paul
Life of this patent
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Abstract
A method for drying a component interior of a component can be used in a lithographic process chain. The method includes a first drying step, in which simultaneously heated air is admitted into a component interior through an inlet, and the heated air is sucked out of the component interior through an outlet. The method also includes a succeeding second drying step, in which the inlet for the heated air is closed and the air is sucked out of the component interior, resulting in a reduced pressure is generated in the component interior.
Claims20
A method for drying a component interior of a component usable in a lithographic process chain, the method comprising:
- a) simultaneously admitting heated air into the component interior through an inlet and removing the heated air out of the component interior through an outlet;
- b) ascertaining a moisture difference between the heated air admitted into the component interior and the heated air removed from the component interior, and
- c) when the moisture difference falls below a moisture threshold value, closing the inlet for the heated air and removing the air from the component interior, thereby reducing a pressure in the component interior.
A device configured to drying a component interior of a component usable in a lithographic process chain, the device comprising:
- a heat unit configured to heat air and admit the heated air into the component interior through an inlet;
- a suction unit configured so that, while the heated air is being admitted in by the heat unit, heated air is removed from the component interior through an outlet;
- a shutoff valve configured to close the inlet when a moisture difference between the heated air blown into the component interior and the heated air removed from of the component interior falls below a moisture threshold value;
- and
- a vacuum unit configured to generate a reduced pressure in the component interior and to remove air out from the component interior when the inlet is closed.
Dependencies are inferred from the claim text.