Roll-to-roll atomic layer deposition apparatus

A roll-to-roll atomic layer deposition apparatus including:

• a casing for providing an inner space that maintains a sealed state;
• a substrate transfer assembly which is provided in an inner space of the casing and includes a plurality of roll units;
• and
• a plurality of gas supply modules for depositing an atomic layer on one surface and a rear surface of a flexible substrate transferred by the substrate transfer assembly,
• wherein the plurality of gas supply modules includes an upper gas supply module facing the one surface of the substrate, and a lower gas supply module which is spaced apart from the upper gas supply module with the substrate being interposed therebetween and faces the rear surface of the substrate, and
• the upper gas supply module and the lower gas supply module include at least one purge gas supply unit, at least one reaction gas supply unit, and at least one source gas supply unit that are disposed along the transfer direction of the substrate,
• wherein the inner space of the casing comprises an upper inner space and a lower inner space, the lower inner space is provided below the upper inner space, and the substrate transfer assembly is configured to transfer the flexible substrate from the lower inner space to the upper inner space, and subsequently transfer the flexible substrate from the upper inner space to the lower inner space,
• wherein the plurality of roll units comprises an unwinding roll unit for feeding the flexible substrate and a winding roll unit for winding the flexible substrate which is past the plurality of gas supply modules, and the unwinding roll unit and the winding roll unit are disposed in the lower inner space,
• wherein the upper space and the lower space are formed to be partially communicated,
• wherein at least one purge gas supply unit is disposed between the purge gas supply units respectively disposed on one side and the other side of the upper gas supply module and the lower gas supply module, and the purge gas supply pressures of the purge gas supply units of the lower gas supply module are formed to be greater than the purge gas supply pressures of the purge gas supply units of the upper gas supply module,
• wherein the purge gas supply pressures of the purge gas supply units respectively disposed on one side and the other side of the upper gas supply module and the lower gas supply module are formed to be greater than the purge gas supply pressure of the purge gas supply unit between the purge gas supply units respectively disposed on one side and the other side of the upper gas supply module and the lower gas supply module.