Electrode filament connection member, chemical vapor deposition apparatus, and method for manufacturing recording medium substrate

An electrode filament connection member for attaching to a chemical vapor deposition apparatus so as to pass through an outer wall of the chemical vapor deposition apparatus in which an electrode filament is disposed in a chamber defined by the outer wall, said electrode filament connection member forming an electrical connection between a wire from a power source provided outside the chamber and the electrode filament, the electrode filament connection member comprising:

• a head portion that is provided in the chamber and attached to the electrode filament;
• and
• a rod portion that extends from the head portion through the outer wall so as to be connected to the wire,
• wherein the head portion and the rod portion are integrally formed as a single component,
• wherein the head portion includes
• an electrode filament attachment portion at a tip end portion, and
• a side surface that is gradually widened from the tip end portion toward a connection surface that connects the side surface and the rod portion, the rod portion passing through the outer wall in the axial direction,
• wherein the head portion has, at the connection surface, a diameter that is greater than a diameter of the rod portion,
• wherein an outer shape of the side surface of the head portion conforms to an outer shape of the electrode filament connection member when viewed in projection along the axial direction,
• wherein the side surface has a curved surface that curves outward from the tip end portion to the connection surface,
• wherein the side surface is formed as a continuous surface,
• wherein an end of the rod portion is disposed outside the outer wall,
• wherein a wire connection hole to which a terminal of the wire is connected is provided at the end of the rod portion,
• wherein an anode plate is disposed in the chamber so as to surround the head portion, the anode plate being electrically insulated from the outer wall and having a through hole through which the electrode filament connection member passes, the through hole being located inward relative to the outer shape of the side surface of the head when viewed in projection along the axial direction, the anode plate being arranged so as not to be in direct contact with the outer wall, and
• wherein an insulating layer is provided between the rod portion and the outer wall so as to insulate the rod portion from the outer wall, the anode plate and the insulating layer being positioned so as not to overlap each other in the axial direction.