Susceptor manufacturing method and susceptor manufactured by the same
AssigneeMiCo Ceramics Ltd.
InventorsMin-Ho Ji, Gi-Myeong Sung
Life of this patent
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Abstract
The present disclosure relates to a method of manufacturing a susceptor. The present disclosure may provide a method of manufacturing a susceptor in which a cap-type bushing structure or tube structure is applied to a bonding structure of a base substrate and an insulating plate, so that the bonding structure can withstand or prevent the increase in pressure inside a gas flow path during a curing process, thereby preventing clogging of a gas hole in a high-power susceptor or the like for a high aspect ratio contact (HARC) processes, and minimizing the occurrence of arcing by reducing contamination around the gas hole. In addition, the present disclosure may also provide a susceptor manufactured by the method.
Claims7
A method of manufacturing a susceptor, the method comprising:
- inserting a tube structure into a groove formed at an end of a gas flow path extending into a gas hole in an insulating plate;
- forming a bonding layer by using a bonding agent to a level equal to or lower than a height of an end of the tube structure;
- bonding a base substrate to the bonding layer by inserting the tube structure into a gas flow path in the base substrate;
- and
- removing the tube structure.
Dependencies are inferred from the claim text.