A method for creating patterns on surfaces by directed energy deposition of metals or metal-containing compounds said method comprising, selecting a pattern for deposition on a surface of a solid substrate,
- providing a reaction mixture comprised of a deposit precursor, a directed
- electromagnetic radiation apparatus, said solid substrate, and a reaction vessel, placing the substrate and reaction mixture in the form of a gas or liquid, which is
- absorbed or adsorbed to the substrate, into the reaction vessel,
- selectively sending directed electromagnetic radiation towards the adsorbed or absorbed reaction mixture in the reaction vessel with the directed energy emission apparatus,
- wherein said selectively sending directed electromagnetic radiation step further comprising either:
- inscribing said pattern with a moving point of incidence of said directed electromagnetic radiation, or
- applying said preselected pattern to said substrate, wherein the form of said preselected pattern is embodied in an interference pattern of the electromagnetic waves applied to said substrate,
- wherein the deposit precursor is a volatile or soluble substance selected from a group consisting of metal carbonyls, metal, metalloid alkyls, metal hydrides, metalloid hydrides, metal cyclopentadienyls, metal alkoxides, metal acetates and combinations thereof,
- wherein electromagnetic energy including laser light is directed by an optical device which creates an intense beam or interference pattern in three dimensions or is projected onto a two-dimensional surface in said selected pattern such that the deposit precursors are only activated to become a deposit where overlapping electromagnetic waves reinforce, and
- further wherein an electrically insulating layer is deposited by directed energy acting on a precursor compound wherein magnesium oxide is deposited upon decomposition of said precursor compound, thereby forming an insulating layer.