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US 12,606,901 B2Granted
Deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorsJunghyun Ahn, Jaesuk Moon, Seungjin Lee
Life of this patent
Estimating the term…
Abstract
Disclosed is a deposition apparatus comprising a mask frame having a frame shape, masks on the mask frame, a magnet plate on the masks, rotating parts connected to a lower portion of the magnet plate, and magnet units connected to the rotating parts, and configured to be rotated by the rotating parts such that polarities of the magnet units are arranged in a direction crossing an extension direction of the masks.
Claims21
A deposition apparatus comprising:
- a mask frame;
- masks on the mask frame;
- a magnet plate on the masks;
- a rotating part connected to a lower portion of the magnet plate;
- and magnet units, one of the magnet units connected to the rotating part, and configured to be rotated by the rotating part,
- wherein the rotating part is configured to rotate the one of the magnet units about a first rotational axis extending substantially perpendicularly to a plane defined by a first direction and a second direction crossing the first direction, and about a second rotational axis extending substantially parallel to the plane, and
- wherein the rotating part is configured to rotate the one of the magnet units such that polarities of the magnet units are arranged in a direction crossing an extension direction of the masks.
4 more elements
A deposition apparatus comprising:
- a mask frame;
- masks on the mask frame;
- a magnet plate on the masks;
- a rotating part connected to a lower portion of the magnet plate;
- and
- magnet units, one of the magnet units connected to the rotating part, and configured to be rotated by the rotating part,
- wherein, on a plane defined by a first direction and a second direction crossing the first direction, the rotating part is configured to rotate the one of the magnet units about a first rotational axis extending substantially perpendicularly to the plane, and about a second rotational axis extending substantially parallel to the plane.
4 more elements
A deposition apparatus comprising:
- a mask frame;
- masks on the mask frame;
- a magnet plate on the masks;
- rotating parts connected to a lower portion of the magnet plate;
- and
- magnet units connected to the rotating parts in a one-to-one relationship, and each of the magnet units is configured to be rotated by the corresponding rotating part about a first rotational axis extending substantially perpendicularly to a plane defined by a first direction and a second direction crossing the first direction, and about a second rotational axis extending substantially parallel to the plane, such that polarities of the magnet units are arranged in a direction crossing an extension direction of the masks.
3 more elements
Dependencies are inferred from the claim text.