Iodoalkyl tin compounds and preparation methods thereof
AssigneesGelest, Inc., Mitsubishi Chemical Corporation
InventorLi Yang
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Abstract
Methods for synthesizing iodoalkyl tin trialkoxide and diiodoalkyl tin trialkoxide compounds having the chemical formulas R′Sn(OR)3 and R″Sn(OR)3 are described. R′ is a primary or secondary iodoalkyl group having about 2 to about 10 carbon atoms and containing at least one iodine atom, R″ is a primary or secondary iodoalkyl group having about 2 to about 10 carbon atoms and containing two iodine atoms, and R is a primary, secondary, or tertiary alkyl group having about 1 to about 5 carbon atoms. The iodoalkyl tin compounds may be used for the formation of high-resolution EUV lithography patterning precursors and are attractive due to their desirable purity and low concentration of bisiodoalkyl and bisdiioodoalkyl impurities.
Claims8
A method of synthesizing an iodoalkyl tin trialkoxide compound having formula (1):
- R′Sn(OR)3 (1)
- wherein R′ is a primary or secondary iodoalkyl group having 2 to 10 carbon atoms and containing at least one iodine atom and R is a primary, secondary, or tertiary alkyl group having 1 to 5 carbon atoms, the method comprising:
- (a) providing a solution of an alkenyl tin trichloride;
- (b) adding a borane solution;
- (c) adding solid iodine or an iodine solution;
- and
- (d) adding a solution of an alkali metal alkoxide to yield a product containing an iodoalkyl tin trialkoxide having formula (1).
Dependencies are inferred from the claim text.