MEMS device with movable electrode plate and feedback capacitor

A MEMS device, comprising:

• a plurality of movable electrode plates, comprising a first movable electrode plate, a second movable electrode plate and a third movable electrode plate;
• a first electrode plate, located on a first side of the first movable electrode plate, the first electrode plate and the first movable electrode plate forming a first capacitor;
• a second electrode plate, located on a second side of the first movable electrode plate, the second electrode plate and the first movable electrode plate forming a second capacitor;
• a first feedback electrode plate, located on a first side of the second movable electrode plate, the first feedback electrode plate and the second movable electrode plate forming a first feedback capacitor;
• a second feedback electrode plate, located on a second side of the second movable electrode plate, the second feedback electrode plate and the second movable electrode plate forming a second feedback capacitor;
• a third feedback electrode plate, located on a first side of the third movable electrode plate, the third feedback electrode plate and the third movable electrode plate forming a third feedback capacitor;
• a fourth feedback electrode plate, located on a second side of the third movable electrode plate, the fourth feedback electrode plate and the third movable electrode plate forming a fourth feedback capacitor;
• a first operational amplifier, a second operational amplifier, and a third operational amplifier;
• wherein the first capacitor is coupled to an inverting input terminal of the first operational amplifier, the second capacitor is coupled to an inverting input terminal of the second operational amplifier, an output terminal of the first operational amplifier is coupled to an inverting input terminal of the third operational amplifier, and an output terminal of the second operational amplifier is coupled to a non-inverting input terminal of the third operational amplifier, so as to form a detection circuit;
• the detection circuit is configured to detect the first capacitor and the second capacitor;
• wherein the first feedback capacitor and the second feedback capacitor are coupled between the inverting input terminal and the output terminal of the first operational amplifier, so as to form a first feedback circuit;
• the third feedback capacitor and the fourth feedback capacitor are coupled between the inverting input terminal and the output terminal of the second operational amplifier, so as to form a second feedback circuit;
• wherein the first feedback circuit and the second feedback circuit are configured to eliminate a nonlinear relationship between an output voltage of the detection circuit and a displacement of one or more of the plurality of movable electrode plates.