Methods for controlling wafer breakage during ingot slicing operations
AssigneeGlobalWafers Co., Ltd.
InventorsJung-Chiang Liao, Yi-Chun Chou, Liang-Chin Chen, Chin-Yu Chang, Ming-Tao Chia, Peter D. Albrecht
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AssigneeGlobalWafers Co., Ltd.
InventorsJung-Chiang Liao, Yi-Chun Chou, Liang-Chin Chen, Chin-Yu Chang, Ming-Tao Chia, Peter D. Albrecht
Estimating the term…
A method of slicing wafers from a monocrystalline semiconductor ingot includes attaching a circumferential edge of the ingot to a bond beam and positioning sacrificial disks adjacent longitudinal end faces of the ingot. One sacrificial disk is positioned adjacent each of the longitudinal end faces. The method also includes connecting the bond beam to a wire saw that includes a wire web and performing a slicing operation on the ingot by operating the wire saw to drive the wire web and move the bond beam and the ingot in a movement direction towards the wire web to slice the wafers from the ingot. The sacrificial disks operate to inhibit uncontrolled breakage of the wafers during the slicing operation.
A method of slicing wafers from a monocrystalline semiconductor ingot, the method comprising:
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