Chuck table manufacturing method
AssigneeDisco Corporation
InventorsJunsoo Woo, Tomotaka Tabuchi
Life of this patent
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Abstract
A chuck table manufacturing method capable of changing over the shape of a holding surface according to at least two workpieces different in area or shape includes a porous plate sticking step of sticking a frame body and a porous plate to each other while the porous plate is accommodated in a recess of the frame body with an upper surface of the porous plate being exposed, a groove forming step of forming, in the porous plate, a groove reaching a bottom surface of the recess, and a resin filling step of filling the groove with a liquid resin and curing the liquid resin.
Claims4
A chuck table manufacturing method capable of providing a shape of a holding surface according to at least two workpieces different in area or shape, the chuck table manufacturing method comprising:
- providing a frame body;
- providing a preformed porous plate;
- a porous plate sticking step of sticking the frame body and the preformed porous plate to each other while the preformed porous plate is accommodated in a recess of the frame body with an upper surface of the preformed porous plate being exposed;
- a groove forming step of forming, in the preformed porous plate, a groove reaching a bottom surface of the recess, after the porous plate sticking step is carried out;
- and
- a resin filling step of filling the groove with a liquid resin and curing the liquid resin.
Dependencies are inferred from the claim text.