Substrate holder

A system for wet processing a substrate comprising:

• a substrate holder comprising:
• a holder body comprising three bars connected to form a U-shape with three sides, two of the three sides being parallel, the other of the three sides being perpendicular to the two of the three sides, each side comprising a first layer and a second layer facing each other with a fixed intervening gap, forming a slot between the two layers to receive a substrate, each of the two of the three sides having a side wall bridging the first layer and the second layer;
• one or more first detent rotational locking mechanisms attached to a first side of the two of the three sides of the holder body, on the first layer;
• one or more second detent rotational locking mechanisms attached to a second side of the two of the three sides of the holder body, on the first layer;
• one or more first bar leaves movably attached to the one or more first detent rotational locking mechanisms, being inside the slot, comprising one or more first top elastomeric buttons;
• and
• one or more second bar leaves movably attached to the one or more second detent rotational locking mechanisms, the one or more second bar leaves being inside the slot, the one or more second bar leaves comprising one or more second top elastomeric buttons,
• wherein (i) the one or more first detent rotational locking mechanisms and the one or more second detent rotational locking mechanisms are configured to provide a clamping force to hold the substrate by pressing the one or more first and the one or more second bar leaves toward the second layer of the holder body by adjusting positions of the one or more first and the one or more second bar leaves within the slot;
• a vessel configured to house the substrate holder;
• and
• an agitation mechanism coupled to the substrate holder and configured to agitate the substrate during a wet process in the vessel, wherein the substrate is securely held by the holder body during the wet process.

A system for wet processing a substrate, the system comprising:

• a vessel filled with a treatment fluid;
• a plurality of substrate holders, each of the plurality of holders comprising,
• a holder body configured to hold a substrate at edge portions of the substrate, the holder body comprising a first layer and a second layer parallel to the first layer, forming a slot between the two layers to receive the substrate,
• one or more detent rotational locking mechanisms attached to the holder body,
• one or more bar leaves inside the slot, attached to the one or more detent rotational locking mechanisms,
• one or more first elastomeric buttons disposed on the one or more bar leaves, and
• one or more second elastomeric buttons disposed on the holder body,
• wherein the one or more first elastomeric buttons and the one or more second elastomeric buttons are positioned to hold opposite sides of the substrate respectively, and
• the one or more detent rotational locking mechanisms are configured to provide a clamping force to hold the substrate positioned between the one or more first elastomeric buttons and the one or more second elastomeric buttons through the one or more bar leaves;
• and
• an agitation mechanism to provide motions to the plurality of substrate holders.