Method for preparing aluminum-based tubular target

A method for preparing an aluminum-based tubular target, comprising the following steps:

• step 1, sleeve assembly:
• arranging a bonding layer (10) on an outer wall of a back tube (6), and forming a sleeve structure on an outer side of the bonding layer (10), the sleeve structure having a cavity with a through hole on an upper end of the sleeve structure;
• wherein the bonding layer (10) is made of zinc or a zinc-aluminum alloy;
• step 2, raw material mixing:
• providing raw materials of the aluminum-based tubular target, mixing the raw materials to be uniform by ball milling to obtain a filling material (3);
• step 3, powder filling:
• completely filling the cavity with the filling material (3) through the through hole to obtain a powder-filled sleeve;
• step 4, sleeve degassing:
• subjecting the powder-filled sleeve to high-temperature degassing with a degassing tube, and sealing the degassing tube to obtain a degassed sleeve;
• step 5, hot isostatic pressing:
• subjecting the degassed sleeve to hot isostatic pressing to obtain an ingot;
• and
• step 6, finished product processing:
• processing the ingot to obtain the aluminum-based tubular target.