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US 12,605,751 B2Granted
Particle removal system and method for controlling particle removal system
AssigneesKawasaki Jukogyo Kabushiki Kaisha, Kawasaki Robotics (USA), Inc.
InventorsHaruhiko Tan, Nobuyasu Shimomura, Theodore Philliber, Ryan Le, Avish Ashok Bharwani, Simon Jeyapalan
Life of this patent
Estimating the term…
Abstract
A particle removal system according to this disclosure includes a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles. The particle removal system includes a charger a robot, and a controller. The controller is configured to control operation of the robot to electrostatically charge the particle absorption tool so as to build up the static electric charge by using the charger.
Claims11
A particle removal system comprising:
- a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles;
- a charger configured to electrostatically charge the particle absorption tool so as to build up the static electric charge;
- a robot including a hand configured to hold the particle absorption tool;
- and
- a controller configured to perform operations comprising operations to control operation of the robot to electrostatically charge the particle absorption tool so as to build up the static electric charge by using the charger, wherein
- the charger includes a voltage applier configured to contact the particle absorption tool and to apply a voltage to the particle absorption tool,
- the robot is arranged in a substrate conveyor and includes a mover configured to move the voltage applier,
- the voltage applier is configured to contact a contact part that is arranged on a peripheral part of the disk-shaped particle absorption tool so as to apply the voltage to the particle absorption tool,
- the hand is configured to selectively hold a substrate and to hold the particle absorption tool in the substrate conveyor, the particle absorption tool having a disk shape similar to the substrate, and
- the controller is configured to perform operations further comprising operations to:
- control operation of the robot to bring the voltage applier into contact with the disk-shaped particle absorption tool being held by the hand in the substrate conveyor to electrostatically charge the particle absorption tool so as to build up the static electric charge, and to absorb particles in at least one of an interior of the substrate conveyor and an interior of a substrate processor by using the particle absorption tool;
- move the voltage applier using the mover to bring the voltage applier into contact with the particle absorption tool, in response to the particle absorption tool being held by the hand;
- and
- move the voltage applier using the mover to retract the voltage applier in response to the particle absorption tool being removed from the hand such that the substrate is capable of being held by the hand.
11 more elements
A method for controlling a particle removal system comprising:
- holding a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles by using a hand included in a robot;
- electrostatically charging the particle absorption tool so as to build up the static electric charge by using a charger by operating the robot;
- and
- absorbing the particles by using the particle absorption tool building up the static electric charge, wherein
- the charger includes a voltage applier configured to contact the particle absorption tool and to apply a voltage to the particle absorption tool,
- the robot is arranged in a substrate conveyor and includes a mover configured to move the voltage applier,
- the voltage applier is configured to contact a contact part that is arranged on a peripheral part of the disk-shaped particle absorption tool so as to apply the voltage to the particle absorption tool,
- the hand is configured to selectively hold a substrate and to hold the particle absorption tool in the substrate conveyor, the particle absorption tool having a disk shape similar to the substrate, and
- the method further comprises:
- controlling operation of the robot to bring the voltage applier into contact with the disk-shaped particle absorption tool being held by the hand in the substrate conveyor to electrostatically charge the particle absorption tool so as to build up the static electric charge, and to absorb particles in at least one of an interior of the substrate conveyor and an interior of a substrate processor by using the particle absorption tool;
- moving the voltage applier using the mover to bring the voltage applier into contact with the particle absorption tool, in response to the particle absorption tool being held by the hand;
- and
- moving the voltage applier using the mover to retract the voltage applier in response to the particle absorption tool being removed from the hand such that the substrate is capable of being held by the hand.
10 more elements
Dependencies are inferred from the claim text.