Rinsing device for rinsing blue film at bottom of wafer
AssigneeYayatech Co., Ltd.
InventorEn-Ning Lin
Life of this patent
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AssigneeYayatech Co., Ltd.
InventorEn-Ning Lin
Estimating the term…
A rinsing device for rinsing a blue film at the bottom of a wafer, including: a base; a water tank; at least one drum disposed in the water tank and partially exposed and vertically protruded from the water tank; at least one drum driver; two vertically-movable scraper sets disposed at the base, flanking the water tank, and each having a scraper, a water collection chamber and a vertically-movable driver, with the scraper disposed above the water collection chamber, the water collection chamber disposed at the vertically-movable driver, and the vertically-movable driver disposed at the base and adapted to drive the water collection chamber and the scraper moving vertically; and a water tray disposed at the base, positioned at the water tank, and positioned below the two scrapers and the two water collection chambers.
A rinsing device for rinsing a blue film at a bottom of a wafer, comprising:
Dependencies are inferred from the claim text.