Detection chip, and manufacturing method and sample introduction method thereof
AssigneesBeijing BOE Technology Development Co., Ltd., Boe Technology Group Co., Ltd.
InventorsKang Peng, Beiyuan Fan, Ding Ding
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Abstract
The present disclosure provides a detection chip, including: a micro-cavity-defining layer having a plurality of micro-pores extending through the micro-cavity-defining layer are arranged; and a ventilative liquid-resistant layer on a side of the micro-cavity-defining layer and completely covering openings on a side of the plurality of micro-pores. The ventilative liquid-resistant layer is configured to allow gas to pass therethrough and to block liquid from passing therethrough. The present disclosure also provides a method for manufacturing a detection chip and a sample introduction method for the detection chip.
Claims19
A detection chip, comprising:
- a micro-cavity-defining layer having a plurality of micro-pores extending through the micro-cavity-defining layer;
- and
- a ventilative liquid-resistant layer on a side of the micro-cavity-defining layer and completely covering openings of the plurality of micro-pores on a side of the plurality of micro-pores, wherein the ventilative liquid-resistant layer is configured to allow gas to pass therethrough and to block liquid from passing therethrough, wherein
- the detection chip further comprises a first substrate on a side of the ventilative liquid-resistant layer away from the micro-cavity-defining layer,
- the first substrate comprises:
- a base substrate having a gas outlet therein,
- a heating electrode on a side of the base substrate close to the ventilative liquid-resistant layer,
- an insulating layer between the base substrate and the heating electrode, wherein an orthographic projection of the insulating layer on the base substrate does not overlap with an orthographic projection of the gas outlet on the base substrate;
- and
- a control electrode between the base substrate and the insulating layer, wherein an orthographic projection of the control electrode on the base substrate does not overlap with the orthographic projection of the gas outlet on the base substrate, the control electrode is electrically connected to the heating electrode through a via in the insulating layer, and the control electrode is configured to transmit an external electric signal to the heating electrode.
A detection chip, comprising:
- a micro-cavity-defining layer having a plurality of micro-pores extending through the micro-cavity-defining layer;
- and
- a ventilative liquid-resistant layer on a side of the micro-cavity-defining layer and completely covering openings of the plurality of micro-pores on a side of the plurality of micro-pores, wherein the ventilative liquid-resistant layer is configured to allow gas to pass therethrough and to block liquid from passing therethrough, wherein
- the detection chip further comprises a first substrate on a side of the ventilative liquid-resistant layer away from the micro-cavity-defining layer,
- the first substrate comprises:
- a base substrate having a gas outlet therein,
- a heating electrode on a side of the base substrate close to the ventilative liquid-resistant layer,
- a protective layer between the heating electrode and an encapsulation spacer, the encapsulation spacer being between the first substrate and the ventilative liquid-resistant layer, wherein
- an orthographic projection of the protective layer on the base substrate completely covers an orthographic projection of the heating electrode on the base substrate, and does not overlap with the orthographic projection of the gas outlet on the base substrate, and
- the protective layer and the ventilative liquid-resistant layer are separated from each other.
Dependencies are inferred from the claim text.