Method of forming catalyst layer
AssigneeKabushiki Kaisha Toshiba
InventorsSusumu Obata, Mitsuo Sano, Keiichiro Matsuo, Kazuhito Higuchi, Kazuo Shimokawa
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Abstract
According to an embodiment, a method of forming a catalyst layer includes performing displacement plating on a substrate having a surface that is made of a semiconductor and includes a plurality of projections, thereby depositing a catalytic metal at positions of the plurality of projections.
Claims7
A method of forming a catalyst layer, comprising performing displacement plating using a displacement plating solution on a substrate comprising a surface that is made of a semiconductor and comprises a plurality of projections, thereby depositing a catalytic metal on each of the plurality of projections, wherein the displacement plating solution contains potassium tetrachloroaurate (III) and hydrofluoric acid, each projection of the plurality of projections having a needle shape extending in a direction intersecting with the surface, and the catalytic metal is deposited in particulate form extending in the direction so as to correspond to the needle shape of said each projection.
Dependencies are inferred from the claim text.