Subcutaneous and continuous blood pressure monitoring
AssigneeThe Regents of the University of California
InventorsLiwei Lin, Yande Peng, Sedat Pala, Zhichun Shao
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Abstract
A subcutaneous continuous blood pressure monitor system based on piezoelectric micromachined ultrasonic transducers (PMUTs) provides remote, silent and continuous monitoring solutions for the BP management.
Claims1
A method of subcutaneous and continuous blood pressure monitoring comprising, continuously monitoring blood pressure of a person or other mammal with a subcutaneous, implantable blood pressure monitoring device with an array of piezoelectric micromachined ultrasonic transducers (PMUTs), configured for subcutaneous and continuous and silent blood pressure monitoring without a cuff, implanted in the person or the other mammal, wherein the PMUTs comprise a vacuum cavity silicon-on-insulator (SOI) water segment,
- and wherein:
- the PMUTs comprise an aluminum nitride (AlN) piezoelectric layer;
- the PMUTs comprise a round pressure sensing diaphragm having protruding tabs to facilitate electrical connections;
- and
- the PMUTs comprise from bottom to top molybdenum (Mo), AlN and Mo layers;
- and wherein the device is configured, from bottom to top:
- a) the vacuum cavity silicon-on-insulator (SOI) wafer segment;
- b) the aluminum nitride (AlN) piezoelectric layer;
- c) the molybdenum (Mo), AlN and Mo lavers;
- d) a dielectric layer of SiO2 patterned to open a top-to-top via;
- and
- e) Al connection lines and pada.
Dependencies are inferred from the claim text.