# US 12,604,720 B2 · Through mold interconnect drill feature

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- Number: US 12,604,720 B2
- Document ID: US12604720B2
- Status: Granted
- Kind: B2
- Application number: 18/374,585
- Filed: 2023-09-28
- Published: 2024-01-18
- Granted: 2026-04-14
- Earliest claimed: 2019-08-26
- Assignees: Intel Corporation
- Applicants: Intel Corporation
- Inventors: Robert M. Nickerson; Rees Winters; Purushotham Kaushik Muthur Srinath
- Web page: https://patentgrep.com/patent/US12604720B2

## CPC

- H10W 20/20: Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
- H10W 74/121: {by multiple encapsulations, e.g. by a thin protective coating and a thick encapsulation}
- H10W 74/117: {the substrate having spherical bumps for external connection}
- H10W 74/124: {the encapsulations having cavities other than that occupied by chips}
- H10W 74/142: {the encapsulations exposing the passive side of the semiconductor body}
- H10W 74/15: on active surfaces of flip-chip devices, e.g. underfills
- H10W 90/722: {between stacked chips}
- H10W 90/724: {between a chip and a stacked insulating package substrate, interposer or RDL}
- H10W 90/754: {between a chip and a stacked insulating package substrate, interposer or RDL}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

Embodiments disclosed herein include electronic packages. In an embodiment, an electronic package comprises a package substrate, a first die electrically coupled to the package substrate, and a mold layer over the package substrate and around the first die. In an embodiment, the electronic package further comprises a through mold opening through the mold layer, and a through mold interconnect (TMI) in the through mold opening, wherein a center of the TMI is offset from a center of the through mold opening.

## Claims

### Claim 1

An electronic system, comprising:
a bottom package comprising a first package substrate having a top side and an opposite bottom side, a first die coupled to the top side of the first package substrate by interconnects, and underfill material around the interconnects and along an entirety of sidewalls of the first die, a first mold layer over the first package substrate and surrounding the underfill material and the first die, and a through mold interconnect through the first mold layer and laterally adjacent to the first die, the through mold interconnect comprising a first conductive portion on the top surface of the first package substrate, and a second conductive portion on the first conductive portion, the second conductive portion distinct from the first conductive portion, wherein the first conductive portion has a maximum lateral width greater than a maximum lateral width of the second conductive portion, and the bottom package comprising a second mold layer in contact with the first mold layer and a top surface of the first die, the second mold layer having a planar bottom surface along the top surface of the first die; and
a top package coupled to the bottom package, the top package comprising a second package substrate having a top side and an opposite bottom side, a second die above and coupled to the top side of the second package substrate by a first wire bond, and a third die over the second die, the third die laterally offset from the second die, and the third die coupled to the top side of the second package substrate by a second wire bond, and a third mold layer over the second die and the third die and over the second package substrate, wherein the first die of the bottom package extends laterally beyond a sidewall of the third die.

### Claim 2 (depends on 1)

The electronic system of claim 1, wherein the first conductive portion of the through mold interconnect is a solder ball.

### Claim 3 (depends on 1)

The electronic system of claim 1, wherein the second conductive portion of the through mold interconnect is a solder ball.

### Claim 4 (depends on 1)

The electronic system of claim 1, wherein the first conductive portion of the through mold interconnect is a first solder ball, and wherein the second conductive portion of the through mold interconnect is a second solder ball.

### Claim 5 (depends on 1)

The electronic package of claim 1, wherein the through mold interconnect of the bottom package is in a through mold opening, and wherein the through mold opening has a first sloped sidewall and a second sloped sidewall from a cross-sectional perspective.

### Claim 6 (depends on 5)

The electronic package of claim 5, wherein a center of the through mold interconnect of the bottom package is offset from a center of the through mold opening.

### Claim 7 (depends on 1)

The electronic package of claim 1, wherein the through mold interconnect of the bottom package is in a through mold opening, and a center of the through mold interconnect is offset from a center of the through mold opening.

### Claim 8

An electronic system, comprising:
a lower package comprising a first package substrate, a first die coupled to the first package substrate by first interconnects, and capillary underfill around the first interconnects and along an entirety of sidewalls of the first die, a first mold material over the first package substrate and surrounding the capillary underfill with a curved interface between the first mold material and the capillary underfill, and a second interconnect through the first mold material and laterally adjacent to the first die, the second interconnect comprising a first conductive portion on the first package substrate, and a second conductive portion on the first conductive portion, the second conductive portion distinct from the first conductive portion, wherein the first conductive portion has a maximum lateral width greater than a maximum lateral width of the second conductive portion, and the lower package comprising a second mold material in contact with the first mold material and a top surface of the first die, the second mold material having a planar bottom surface along the top surface of the first die; and
an upper package coupled to the lower package, the upper package comprising a second package substrate, a second die above and coupled to the second package substrate by a first wire bond, and a third die over the second die, the third die laterally offset from the second die, and the third die coupled to the second package substrate by a second wire bond, and a third mold material over the second die and the third die and over the second package substrate, wherein the first die of the lower package extends laterally beyond a sidewall of the third die.

### Claim 9 (depends on 8)

The electronic system of claim 8, wherein the first conductive portion of the second interconnect is a solder ball.

### Claim 10 (depends on 8)

The electronic system of claim 8, wherein the second conductive portion of the second interconnect is a solder ball.

### Claim 11 (depends on 8)

The electronic system of claim 8, wherein the first conductive portion of the second interconnect is a first solder ball, and wherein the second conductive portion of the second interconnect is a second solder ball.

### Claim 12 (depends on 8)

The electronic package of claim 8, wherein the second interconnect is in an opening in the first mold material, and wherein the opening has a first sloped sidewall and a second sloped sidewall.

### Claim 13 (depends on 8)

The electronic package of claim 8, wherein the second interconnect is in an opening in the first mold material, and a center of the second interconnect is offset from a center of the opening.

### Claim 14

An electronic system, comprising:
a first package substrate having a top side and an opposite bottom side;
a first die coupled to the top side of the first package substrate by interconnects;
underfill material around the interconnects and along an entirety of sidewalls of the first die;
a first mold layer over the first package substrate and surrounding the underfill material and the first die;
a through mold interconnect through the first mold layer and laterally adjacent to the first die, the through mold interconnect comprising a first conductive portion on the top surface of the first package substrate, and a second conductive portion on the first conductive portion, the second conductive portion distinct from the first conductive portion, wherein the first conductive portion has a maximum lateral width greater than a maximum lateral width of the second conductive portion;
a second mold layer in contact with the first mold layer and a top surface of the first die, the second mold layer having a planar bottom surface along the top surface of the first die;
a second package substrate above the first die, the second mold layer and the first mold layer, the second package substrate having a top side and an opposite bottom side;
a second die above and coupled to the top side of the second package substrate by a first wire bond;
a third die over the second die, the third die laterally offset from the second die, and the third die coupled to the top side of the second package substrate by a second wire bond, wherein the first die extends laterally beyond a sidewall of the third die; and
a third mold layer over the second die and the third die and over the second package substrate.

### Claim 15 (depends on 14)

The electronic system of claim 14, wherein the first conductive portion of the through mold interconnect is a solder ball.

### Claim 16 (depends on 14)

The electronic system of claim 14, wherein the second conductive portion of the through mold interconnect is a solder ball.

### Claim 17 (depends on 14)

The electronic system of claim 14, wherein the first conductive portion of the through mold interconnect is a first solder ball, and wherein the second conductive portion of the through mold interconnect is a second solder ball.

### Claim 18 (depends on 14)

The electronic package of claim 14, wherein the through mold interconnect is in a through mold opening, and wherein the through mold opening has a first sloped sidewall and a second sloped sidewall from a cross-sectional perspective.

### Claim 19 (depends on 18)

The electronic package of claim 18, wherein a center of the through mold interconnect is offset from a center of the through mold opening.

### Claim 20 (depends on 14)

The electronic package of claim 14, wherein the through mold interconnect is in a through mold opening, and a center of the through mold interconnect is offset from a center of the through mold opening.
