# US 12,604,705 B2 · Ceramic susceptor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,604,705 B2 - Document ID: US12604705B2 - Status: Granted - Kind: B2 - Application number: 19/066,264 - Filed: 2025-02-28 - Published: 2025-09-11 - Granted: 2026-04-14 - Earliest claimed: 2024-03-05 - Assignees: MiCo Ceramics Ltd. - Applicants: MiCo Ceramics Ltd. - Inventors: Hyung-Jun Cho - Web page: https://patentgrep.com/patent/US12604705B2 ## CPC - H10P 72/7624: {characterised by the mechanical construction of the susceptor, stage or support} - H05B 3/03: Electrodes - H05B 3/143: {applied to semiconductors, e.g. wafers heating (H05B3/0047 takes precedence)} - H10P 72/0432: {mainly by conduction} - H10P 72/7626: {characterised by the construction of the shaft} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL ## Abstract Disclosed is a ceramic susceptor. The ceramic susceptor may include: an insulating plate in which one or more electrodes are arranged; a hollow shaft with one end connected to the insulating plate; and one or more electrode rods connected to the electrodes. The hollow shaft may include one or more side wall holes penetrating an interior of a side wall, and the one or more electrode rods may include one or more first electrode rods, each of which is electrically connected to a first electrode among the one or more electrodes. The first electrode rods may extend through the side wall holes, respectively. ## Claims ### Claim 1 A ceramic susceptor comprising: an insulating plate in which one or more electrodes are arranged; a hollow shaft with one end connected to the insulating plate; and one or more electrode rods connected to the one or more electrodes, wherein the hollow shaft comprises one or more side wall holes penetrating an interior of a side wall, wherein the one or more electrode rods comprise one or more first electrode rods, each of which has one end electrically connected to a first electrode among the one or more electrodes, the one or more first electrode rods extending through the one or more side wall holes, respectively, and wherein the one or more first electrode rods each comprise a gas flow path formed of an internal empty space configured to introduce gas from another end, and one or more gas holes in communication with the gas flow path. ### Claim 2 (depends on 1) The susceptor of claim 1, wherein the one or more electrode rods further comprise one or more second electrode rods, each of which is connected to a second electrode among the one or more electrodes, the one or more second electrode rods extending through a hollow of the hollow shaft. ### Claim 3 (depends on 2) The ceramic susceptor of claim 2, wherein the first electrodes each comprise a heater electrode, and the second electrodes each comprise a radio frequency electrode. ### Claim 4 (depends on 3) The ceramic susceptor of claim 3, wherein multiple first electrode rods are respectively connected to terminals of the heater electrodes. ### Claim 5 (depends on 2) The ceramic susceptor of claim 2, wherein the first electrodes each comprise a radio frequency electrode, and the second electrodes each comprise a heater electrode. ### Claim 6 (depends on 5) The ceramic susceptor of claim 5, wherein multiple second electrode rods are respectively connected to terminals of the heater electrodes. ### Claim 7 (depends on 1) The ceramic susceptor of claim 1, further comprising: a conductive socket coupled to the one or more electrode rods and configured to supply power, wherein the conductive socket comprises a gas supply flow path configured to communicate with the gas flow path. ### Claim 8 (depends on 1) The ceramic susceptor of claim 1, further comprising: a mount coupled to a lower portion of the hollow shaft. ### Claim 9 (depends on 8) The ceramic susceptor of claim 8, wherein the hollow shaft comprises a groove formed on a surface coupled to the mount and extending to meet the side wall holes at least once, wherein the mount comprises a gas supply flow path configured to communicate with the groove, and wherein the one or more first electrode rods pass through the groove. ### Claim 10 (depends on 8) The ceramic susceptor of claim 8, wherein the one or more electrode rods further comprise one or more second electrode rods, each of which is connected to a second electrode among the one or more electrodes, the one or more electrode rods extending through a hollow of the hollow shaft, and wherein the one or more second electrode rods extend through the mount. ### Claim 11 A ceramic susceptor comprising: an insulating plate in which one or more electrodes are arranged; a hollow shaft with one end connected to the insulating plate; and one or more electrode rods connected to the one or more electrodes, wherein the hollow shaft comprises a side wall and a plurality of convex portions that are convex radially inward from an inner surface of the side wall, and side wall holes penetrating the side wall and respectively disposed in each of the plurality of convex portions, wherein the one or more electrode rods comprise a plurality of first electrode rods, and wherein each of the plurality of first electrode rods has one end electrically connected to a first electrode among the one or more electrodes, and extends through each of the side wall holes. ### Claim 12 (depends on 11) The ceramic susceptor of claim 11, further comprising a mount coupled to a lower portion of the hollow shaft, wherein the hollow shaft comprises a groove formed on a surface coupled to the mount and extending to meet the side wall holes at least once, and the mount comprises a gas supply flow path configured to communicate with the groove.