# US 12,604,703 B2 · Wafer chuck with thermal tuning cavity features > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,604,703 B2 - Document ID: US12604703B2 - Status: Granted - Kind: B2 - Application number: 17/759,505 - Filed: 2021-01-28 - Published: 2023-03-16 - Granted: 2026-04-14 - Earliest claimed: 2020-01-29 - Assignees: Lam Research Corporation - Applicants: Lam Research Corporation - Inventors: Siyuan Tian; Yuma Ohkura - Web page: https://patentgrep.com/patent/US12604703B2 ## CPC - H10P 72/722: {Details of electrostatic chucks} - C23C 16/4586: {Elements in the interior of the support, e.g. electrodes, heating or cooling devices} - H10P 72/0432: {mainly by conduction} - H10P 72/0434: {mainly by convection} - H10P 72/0602: {Temperature monitoring} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract Wafer chucks or baseplates therefor are disclosed that feature thermal tuning cavity features that are positioned and sized so as to provide a more uniform temperature distribution across a wafer support surface of such a wafer chuck. Each thermal tuning cavity feature may be positioned adjacent to a portion or portions of a heat exchange passage or passages within a baseplate of the wafer chuck. By locating thermal tuning cavity features in locations underneath where the wafer support surface of the wafer chuck would otherwise demonstrate localized regions of lower temperature (as compared with adjacent regions of the wafer chuck support surface), the lower-temperature regions may be caused to have elevated temperatures that more closely match the surrounding temperatures, thereby increasing temperature uniformity. ## Claims ### Claim 1 An apparatus comprising: a baseplate for a wafer chuck, the baseplate including: a heat exchange passage located within the baseplate, and one or more thermal tuning cavity features located within the baseplate, wherein: each thermal tuning cavity feature is positioned adjacent to a portion or portions of the heat exchange passage, each thermal tuning cavity feature corresponds with a void space within the baseplate, the one or more thermal tuning cavity features are fluidically isolated from the heat exchange passage within the baseplate, and at least one of the one or more thermal tuning cavity features is positioned adjacent to, and radially interposed between, different portions of the heat exchange passage that are radially adjacent to one another. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the one or more thermal tuning cavity features are empty of liquids when the baseplate is in normal use. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein at least one of the one or more thermal tuning cavity features is sealed and has a vacuum environment within it. ### Claim 4 (depends on 3) The apparatus of claim 3, wherein the vacuum environment has a pressure less than or equal to 1 torr. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein at least one of the one or more thermal tuning cavity features is sealed and filled with a gas. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein: the baseplate has one or more hole features that extend into or through the baseplate, are fluidically isolated from the heat exchange passage within the baseplate, and are configured to have a portion of a component located therewithin during normal use of the baseplate in a semiconductor processing chamber, the one or more thermal tuning cavity features includes at least a first thermal tuning cavity feature and a second thermal tuning cavity feature, the first thermal tuning cavity feature and the second thermal tuning cavity feature are substantially symmetrically positioned on either side of a radial axis that extends from a center point of the baseplate through a center axis of a first hole feature of the one or more hole features and such that at least a portion of the heat exchange passage lies between the first hole feature and both the first thermal tuning cavity feature and the second thermal tuning cavity feature, and the center axis of the baseplate passes through a location that corresponds with a nominal center point of a circular semiconductor wafer that the baseplate is configured to support. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein: the baseplate has two or more hole features that extend into or through the baseplate, are fluidically isolated from the heat exchange passage within the baseplate, and are configured to have a portion of a component located therewithin during normal use of the baseplate in a semiconductor processing chamber, the two or more hole features include a first hole feature and a second hole feature, the first hole feature and the second hole feature are both located between a first portion of the heat exchange passage and a second portion of the heat exchange passage, and the one or more thermal tuning cavity features includes at least a first thermal tuning cavity feature that is interposed between the first portion and the second portion as well as between the first hole feature and the second hole feature. ### Claim 8 (depends on 1) The apparatus of claim 1, wherein at least one of the one or more thermal tuning cavity features is a slot with a uniform cross-sectional width in a region between a first end of the slot and a second, opposing end of the slot. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein at least one of the one or more thermal tuning cavity features is a slot with a non-uniform cross-sectional width in a region between a first end of the slot and a second, opposing end of the slot. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein there are a plurality of thermal tuning cavity features and the thermal tuning cavity features are distributed non-uniformly throughout the baseplate. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein each location of a thermal tuning cavity feature would, if (a) the corresponding thermal tuning cavity feature were instead replaced with the same material of the baseplate that adjoins the corresponding thermal tuning cavity feature and (b) the baseplate were heated to a temperature used in normal processing operations using the baseplate, correspond with a region of below-average temperature on a wafer support surface of the baseplate with respect to the average temperature of the wafer support surface of the baseplate. ### Claim 12 (depends on 1) The apparatus of claim 1, wherein at least one of the one or more thermal tuning cavity features is fully enclosed within the baseplate. ### Claim 13 (depends on 1) The apparatus of claim 1, wherein at least one of the one or more thermal tuning cavity features is a recess that extends into the baseplate from a first side of the baseplate and does not extend through the baseplate to a side of the baseplate opposite the first side. ### Claim 14 (depends on 1) The apparatus of claim 1, wherein at least one of the one or more thermal tuning cavity features extends completely through the baseplate. ### Claim 15 (depends on 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14) The apparatus of any one of claims 1 through 14, further comprising a wafer chuck that includes the baseplate. ### Claim 16 (depends on 15) The apparatus of claim 15, wherein the one or more thermal tuning cavity features are empty of liquids when the wafer chuck is in normal use. ### Claim 17 (depends on 16) The apparatus of claim 16, wherein: the baseplate has one or more hole features that extend into or through the baseplate, are fluidically isolated from the heat exchange passage within the baseplate, and are configured to have a portion of a component located therewithin during normal use of the wafer chuck in a semiconductor processing chamber, the one or more thermal tuning cavity features includes at least a first thermal tuning cavity feature and a second thermal tuning cavity feature, the first thermal tuning cavity feature and the second thermal tuning cavity feature are substantially symmetrically positioned on either side of a radial axis that extends from a center point of the baseplate through a center axis of a first hole feature of the one or more hole features and such that at least a portion of the heat exchange passage lies between the first hole feature and both the first thermal tuning cavity feature and the second thermal tuning cavity feature, and the center axis of the baseplate passes through a location that corresponds with a nominal center point of a circular semiconductor wafer that the wafer chuck is configured to support. ### Claim 18 (depends on 16) The apparatus of claim 16, wherein: the baseplate has two or more hole features that extend into or through the baseplate, are fluidically isolated from the heat exchange passage within the baseplate, and are configured to have a portion of a component located therewithin during normal use of the wafer chuck in a semiconductor processing chamber, the two or more hole features include a first hole feature and a second hole feature, the first hole feature and the second hole feature are both located between a first portion of the heat exchange passage and a second portion of the heat exchange passage, and the one or more thermal tuning cavity features includes at least a first thermal tuning cavity feature that is interposed between the first portion and the second portion as well as between the first hole feature and the second hole feature. ### Claim 19 (depends on 16) The apparatus of claim 16, wherein each location of a thermal tuning cavity feature would, if (a) the corresponding thermal tuning cavity feature were instead replaced with the same material of the baseplate that adjoins the corresponding thermal tuning cavity feature and (b) the baseplate were heated to a temperature used in normal processing operations using the wafer chuck, correspond with a region of below-average temperature on a wafer support surface of the wafer chuck with respect to the average temperature of the wafer support surface of the wafer chuck. ### Claim 20 (depends on 16) The apparatus of claim 16, further including a top plate, wherein the top plate is positioned on a top surface of the wafer chuck. ### Claim 21 (depends on 20) The apparatus of claim 20, wherein the top plate includes one or more heater elements. ### Claim 22 (depends on 21) The apparatus of claim 21, wherein the top plate is made, at least in part, of a ceramic material.