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US 12,604,673 B2Granted
Josephson junction device and method of making the same
AssigneeNorthrop Grumman Systems Corporation
InventorsJustin C. Hackley, Patrick R. Warner
Life of this patent
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Abstract
A Josephson junction (JJ) device is provided. The JJ device comprises an operating JJ, a first hydrogen-trapping JJ having a first end coupled to a first end of the operating JJ and a second end coupled to a first superconductor wire, and a second hydrogen-trapping JJ having a first end coupled to a second end of the operating JJ and a second end coupled to a second superconductor wire. The first hydrogen-trapping JJ and the second hydrogen-trapping JJ mitigates hydrogen diffusion into the operating JJ.
Claims11
A method of forming a Josephson Junction (JJ) device, the method comprising:
- forming a photoresist material layer over a substrate to form a JJ structure;
- patterning the photoresist material layer to form openings in the photoresist material layer and a photoresist bridge near a central region of the JJ structure;
- performing a first angular superconducting deposition process on the JJ structure to form a plurality of superconductor bottom electrodes on the substrate;
- performing an oxidation process to provide an oxidized top surface on the plurality of superconductor bottom electrodes;
- performing a second angular superconducting deposition process on the JJ structure to form a plurality of superconductor top electrodes with an overlapping portion of one of the plurality of superconductor top electrodes overlapping one of the plurality of superconductor bottom electrodes with an oxidized top surface therebetween to form a JJ below the photoresist bridge near the central region of the JJ structure;
- performing a dry oxidizing process under vacuum to form a protective oxide on the JJ;
- and
- removing the photoresist material layer to provide a final resulting JJ structure.
5 more elements
Dependencies are inferred from the claim text.