Back to results
US 12,604,651 B2Granted
Rapid fabrication of semiconductor thin films
AssigneeMassachusetts Institute of Technology
InventorsVladimir Bulovic, Richard Swartwout
Life of this patent
Estimating the term…
Abstract
Semiconductor thin films and rapid methods of fabrication can include mixed cations created through recrystalization.
Claims26
A method of fabricating a semiconductor thin film comprising:
- depositing a perovskite precursor in a first solvent on a substrate, the precursor forming a first perovskite layer on a surface of the substrate;
- applying a recrystallization additive in a second solvent to the layer on the surface of the substrate to form a second layer on the substrate, wherein the first perovskite layer and the second layer are deposited sequentially without thermal treatment in between;
- and
- annealing the first layer and the second layer to exchange a cation of the recrystallization additive with a cation of the perovskite precursor to form a perovskite alloy film and a volatile byproduct.
1 more element
Dependencies are inferred from the claim text.