# US 12,604,593 B2 · LED structure, LED device and method of manufacturing LED structure

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- Number: US 12,604,593 B2
- Document ID: US12604593B2
- Status: Granted
- Kind: B2
- Application number: 18/176,621
- Filed: 2023-03-01
- Published: 2023-09-07
- Granted: 2026-04-14
- Earliest claimed: 2022-03-02
- Assignees: Enkris Semiconductor (Wuxi), Ltd.
- Applicants: Enkris Semiconductor (Wuxi), Ltd.
- Inventors: Weihua Liu
- Web page: https://patentgrep.com/patent/US12604593B2

## CPC

- H10H 29/142: {Two-dimensional arrangements, e.g. asymmetric LED layout}
- H10H 20/01335: {the light-emitting regions comprising nitride materials}
- H10H 20/813: having a plurality of light-emitting regions, e.g. multi-junction LEDs or light-emitting devices having photoluminescent regions within the bodies
- H10H 20/815: having stress relaxation structures, e.g. buffer layers
- H10H 20/821: of the light-emitting regions, e.g. non-planar junctions
- H10H 20/851: Wavelength conversion means
- H10H 20/811: having quantum effect structures or superlattices, e.g. tunnel junctions
- H10H 20/819: characterised by their shape, e.g. curved or truncated substrates
- H10H 20/825: containing nitrogen, e.g. GaN
- H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS

## Abstract

Disclosed are an LED structure, an LED device, and a manufacture method for the LED structure. The LED structure includes a substrate structure, and a first region and a second region are periodically provided in the substrate structure. The substrate structure includes a substrate and at least one patterned mask layer located on the substrate, the at least one patterned mask layer is located in the second region, and patterned mask layer in each second region are periodically provided. A light-emitting unit is located on the substrate structure, the light-emitting unit includes a first sub-light-emitting structure located in the first region and a second sub-light-emitting structure located in the second region, and light-emitting wavelengths of the first sub-light-emitting structure and the second sub-light-emitting structure are different. A light-emitting unit with two main light-emitting wavelengths is realized on a same substrate.

## Claims

### Claim 1

A light-emitting diode (LED) structure, comprising:
a substrate structure, the substrate structure having at least one first region and at least one second region; the substrate structure comprising a substrate and at least one patterned mask layer which is located in a partial region in each of the at least one second region located on the substrate; and
a light-emitting unit located on the substrate structure, the light-emitting unit comprising a first sub-light-emitting structure located in the at least one first region and a second sub-light-emitting structure located in the at least one second region, and light-emitting wavelengths of the first sub-light-emitting structure and the second sub-light-emitting structure being different;
wherein the light-emitting unit comprises a first semiconductor layer, a light-emitting layer and a second semiconductor layer that are stacked in sequence, wherein the first semiconductor layer, the light-emitting layer, and the second semiconductor layer each constitute a layer that continuously covers both the first region and the second region;
wherein the first semiconductor layer in the second region is a three-dimensional epitaxial structure with inclined sidewalls, and the light-emitting layer of the second sub-light-emitting structure is an inclined structure formed by conformally covering the inclined sidewalls of the first semiconductor layer.

### Claim 2 (depends on 1)

The LED structure according to claim 1, wherein the light-emitting unit comprises In element, and a content of In in the first sub-light-emitting structure is different from a content of In in the second sub-light-emitting structure.

### Claim 3 (depends on 1)

The LED structure according to claim 1, wherein one of the at least one patterned mask layer comprises a plurality of patterns, and the plurality of patterns in each of the at least one second region are provided periodically and separately from each other.

### Claim 4 (depends on 3)

The LED structure according to claim 3, wherein a shape of an orthographic projection of the patterns on the at least one second region is any one of a rectangle, a triangle, a circle or a square.

### Claim 5 (depends on 1)

The LED structure according to claim 1, wherein the at least one patterned mask layer is made of insulating materials.

### Claim 6 (depends on 1)

The LED structure according to claim 1, wherein the light-emitting unit further comprises an insertion layer located in the first semiconductor layer, wherein a conductivity type of the insertion layer is the same as a conductivity type of the first semiconductor layer, and wherein a material of the insertion layer is AlGaN.

### Claim 7 (depends on 1)

The LED structure according to claim 1, wherein the LED structure further comprises a stress modulation layer, and the stress modulation layer is located between the first semiconductor layer and the light-emitting layer, wherein the stress modulation layer has a superlattice structure comprising Group III-V compound materials, and wherein the stress modulation layer is configured to enlarge a difference in built-in stress between the first sub-light-emitting structure and the second sub-light-emitting structure.

### Claim 8 (depends on 7)

The LED structure according to claim 7, wherein a minimum repeating unit of the superlattice structure is selected from a combination of InGaN/GaN or AlGaN/GaN.

### Claim 9 (depends on 1)

The LED structure according to claim 1, wherein a thickness of the at least one patterned mask layer is less than 2 μm.

### Claim 10 (depends on 1)

The LED structure according to claim 1, wherein one of the at least one patterned mask layer is a grid structure with a plurality of mesh holes, and the plurality of mesh holes above each of the at least one second region are provided periodically and provided separately from each other, a shape of an orthographic projection of the mesh holes on the at least one second region is any one of a rectangle, a triangle, a circle or a square.

### Claim 11 (depends on 1)

The LED structure according to claim 1, wherein the light-emitting unit is an epitaxial structure formed on the substrate structure through an epitaxial growth process.

### Claim 12 (depends on 11)

The LED structure according to claim 11, wherein the at least one patterned mask layer is used for suppressing epitaxial growth of the first semiconductor layer of the light-emitting unit located above the at least one patterned mask layer, so that the first semiconductor layer epitaxially grown in the second region is formed as the three-dimensional epitaxial structure with inclined sidewalls, and the first sub-light-emitting structure and the second sub-light-emitting structure formed through a same process have different light-emitting wavelengths.

### Claim 13 (depends on 1)

The LED structure according to claim 1, wherein the at least one first region comprises a plurality of first regions, and the at least one second region comprises a plurality of second regions, wherein the plurality of first regions and the plurality of second regions are periodically and alternately provided.

### Claim 14 (depends on 1)

An LED device, comprising:
the LED structure according to claim 1;
a package substrate located on a side of the substrate structure away from the light-emitting unit; and
an encapsulation adhesive, the encapsulation adhesive covering an upper surface and sidewalls of the LED structure, at least a partial region of the encapsulation adhesive comprising a phosphor material.

### Claim 15 (depends on 14)

The LED device according to claim 14, wherein a width of the LED structure is less than 100 μm.

### Claim 16 (depends on 14)

The LED device according to claim 14, wherein a width of the at least one first region is less than 50 μm; and a width of the at least one second region is less than 50 μm.

### Claim 17 (depends on 14)

The LED device according to claim 14, wherein one of the at least one patterned mask layer comprises a plurality of patterns, and the plurality of patterns above each of the at least one second region are provided periodically and provided separately from each other; a width of one of the plurality of patterns is less than 10 μm; and a distance between the plurality of patterns in each of the at least one second region is less than 10 μm.

### Claim 18 (depends on 14)

The LED device according to claim 14, wherein light emitted by the light-emitting unit in the LED structure located in the at least one first region is green light, and light emitted by the light-emitting unit located in the at least one second region is blue light; wherein the phosphor material is a red light phosphor material.

### Claim 19

A manufacturing method for an LED structure, comprising:
providing a substrate, the substrate comprising at least one first region and at least one second region;
forming at least one patterned mask layer over a partial region of the at least one second region of the substrate to form a substrate structure comprising the substrate and the at least one patterned mask layer located on an upper surface of the substrate; and
forming a light-emitting unit on the substrate structure through an epitaxial growth process, the light-emitting unit comprising a first sub-light-emitting structure formed over the at least one first region and a second sub-light-emitting structure formed over the at least one second region; wherein the light-emitting unit comprises a first semiconductor layer, a light-emitting layer and a second semiconductor layer that are stacked in sequence, wherein the first semiconductor layer, the light-emitting layer, and the second semiconductor layer each constitute a layer that continuously covers both the first region and the second region;
wherein the at least one patterned mask layer is configured to suppress epitaxial growth of the light-emitting unit located above the at least one patterned mask layer, such that the first semiconductor layer epitaxially grown in the second region is formed as a three-dimensional epitaxial structure with inclined sidewalls, and the light-emitting layer of the second sub-light-emitting structure conformally covers the inclined sidewalls of the first semiconductor layer to form an inclined structure, so that the first sub-light-emitting structure and the second sub-light-emitting structure formed through a same process have different light-emitting wavelengths.