# US 12,604,543 B2 · Manufacturing method of image sensor package

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- Number: US 12,604,543 B2
- Document ID: US12604543B2
- Status: Granted
- Kind: B2
- Application number: 18/141,295
- Filed: 2023-04-28
- Published: 2023-12-28
- Granted: 2026-04-14
- Earliest claimed: 2022-06-24
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Samsung Electronics Co., Ltd.
- Inventors: Sunjae Kim
- Web page: https://patentgrep.com/patent/US12604543B2

## CPC

- H10F 39/018: {of hybrid image sensors}
- H10F 39/024: {of coatings or optical elements}
- H10F 39/026: {Wafer-level processing}
- H10F 39/028: {performed after manufacture of the image sensors, e.g. annealing, gettering of impurities, short-circuit elimination or recrystallisation}
- H10F 39/182: {Colour image sensors}
- H10F 39/804: {Containers or encapsulations}
- H10F 39/8053: {Colour filters}
- H10F 39/8063: {Microlenses}
- H10F 39/809: {of hybrid image sensors}
- H10F 39/811: {Interconnections}
- H10W 46/503: {Located in scribe lines}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

Provided is a method of manufacturing an image sensor package, the method including preparing a device wafer including a plurality of chip portions and a scribe lane, forming a redistribution insulating film on a lower surface of the device wafer to cover a redistribution pattern and a portion of the redistribution pattern and to cover a lower surface of the device wafer, forming a redistribution pattern on a lower surface of the device wafer and a redistribution insulating film to cover a portion of the redistribution pattern and to cover a lower surface of the device wafer, placing a preliminary transparent substrate on an upper surface of the device wafer on which the preliminary dam pattern is formed, performing a laser bonding process of radiating a laser beam to the preliminary dam pattern, and performing a singulation process forming individual image sensor packages.

## Claims

### Claim 1

A method of manufacturing an image sensor package, the method comprising:
preparing a device wafer including a plurality of chip portions and a scribe lane portion surrounding the plurality of chip portions;
forming a redistribution pattern on a lower surface of the device wafer and a redistribution insulating film to cover a portion of the redistribution pattern and to cover a lower surface of the device wafer;
forming an external connection terminal on a redistribution pad that is a portion of the redistribution pattern that is not covered by the redistribution insulating film;
forming a preliminary dam pattern covering the scribe lane portion and a portion of an upper surface of the device wafer adjacent to the scribe lane portion;
placing a preliminary transparent substrate on an upper surface of the device wafer on which the preliminary dam pattern is formed;
performing a laser bonding process of radiating a laser beam to the preliminary dam pattern; and
performing a singulation process forming individual image sensor packages each of which including a transparent substrate, a dam, and a residual scribe lane portion that is a portion of a chip portion and the scribe lane portion by cutting the preliminary transparent substrate, the preliminary dam pattern, and the scribe lane portion,
wherein the preparing of the device wafer comprises disposing a color filter array in each of the plurality of chip portions, and disposing a micro lens array on the color filter array in each of the plurality of chip portions of the device wafer, and
wherein the forming of the preliminary dam pattern is performed so that the preliminary dam pattern does not cover the color filter array and the micro lens array.

### Claim 2 (depends on 1)

The method of claim 1, wherein the performing of the laser bonding process comprises bonding the preliminary dam pattern to the device wafer and the preliminary transparent substrate.

### Claim 3 (depends on 1)

The method of claim 1, wherein the preparing of the device wafer comprises having a step portion in the scribe lane portion on the upper surface of the device wafer.

### Claim 4 (depends on 3)

The method of claim 3, wherein the forming of the preliminary dam pattern comprises forming the preliminary dam pattern to fill the step portion.

### Claim 5 (depends on 4)

The method of claim 4, wherein the dam comprises a base dam portion positioned at a vertical level higher than an upper surface of the chip portion and a protruding dam portion filling the step portion, and the base dam portion and the protruding dam portion are integrally formed.

### Claim 6 (depends on 5)

The method of claim 5, wherein a thickness of the protruding dam portion is smaller than a thickness of the base dam portion.

### Claim 7 (depends on 1)

The method of claim 1, wherein the preparing of the device wafer comprises forming a plurality of through electrodes extending into the device wafer from the lower surface of the device wafer.

### Claim 8 (depends on 7)

The method of claim 7, wherein the plurality of through electrodes are formed to overlap each of the micro lens array and the color filter array in a vertical direction.

### Claim 9

A method of manufacturing an image sensor package, the method comprising:
preparing a device wafer to which a first wafer including a plurality of image sensor chip portions and a first scribe lane portion surrounding the plurality of image sensor chip portions and a second wafer including a plurality of logic chip portions and a second scribe lane portion surrounding the plurality of logic chip portions are bonded;
forming a preliminary dam pattern covering the first scribe lane portion and a portion of an upper surface of the first wafer adjacent to the first scribe lane portion;
positioning a preliminary transparent substrate on the upper surface of the first wafer on which the preliminary dam pattern is formed;
adhering the preliminary dam pattern to the device wafer and the preliminary transparent substrate by performing a laser bonding process of radiating a laser beam to the preliminary dam pattern; and
performing a singulation process forming individual image sensor packages each of which including a transparent substrate, a dam, and an image sensor chip portion and a logic chip portion by cutting the preliminary transparent substrate, the preliminary dam pattern, and the device wafer.

### Claim 10 (depends on 9)

The method of claim 9, wherein the preparing of the device wafer comprises disposing a color filter array in each of the plurality of image sensor chip portions, and disposing a micro lens array on the color filter array in each of the plurality of image sensor chip portions of the first wafer.

### Claim 11 (depends on 10)

The method of claim 10, wherein the preparing of the device wafer comprises forming a plurality of through electrodes extending from a lower surface of the second wafer into the logic chip portion and overlapping each of the micro lens array and the color filter array in a vertical direction.

### Claim 12 (depends on 9)

The method of claim 9, wherein the preparing of the device wafer comprises:
attaching the first wafer including a first substrate and a first interlayer insulating film on a first carrier substrate; and
bonding the second wafer including a second substrate and a second interlayer insulating film to the first wafer, and
wherein the second wafer is bonded to the first wafer such that the first interlayer insulating film and the second interlayer insulating film are positioned to be in contact with each other.

### Claim 13 (depends on 12)

The method of claim 12, wherein the forming of the preliminary dam pattern comprises:
separating the device wafer from the first carrier substrate;
attaching the device wafer on a second carrier substrate such that the second wafer faces the second carrier substrate;
forming a dam material layer on the first wafer; and
removing a portion of the dam material layer.

### Claim 14 (depends on 9)

The method of claim 9, wherein preparing the device wafer comprises having a step portion in the first scribe lane portion of the first wafer, the step portion having an upper surface at a lower vertical level than other portions of the first wafer, and
wherein the forming of the preliminary dam pattern comprises forming the preliminary dam pattern to fill the step portion.

### Claim 15 (depends on 14)

The method of claim 14, wherein the dam comprises a base dam portion positioned at a vertical level higher than an upper surface of the image sensor chip portion, and a protruding dam portion filling the step portion and having a thickness smaller than a thickness of the base dam portion as one body, and
wherein the bonding of the second wafer to the first wafer comprises positioning the second wafer on the first wafer such that the first scribe lane portion of the first wafer and the second scribe lane portion of the second wafer vertically overlap each other.

### Claim 16

A method of manufacturing an image sensor package, the method including:
preparing a device wafer by bonding a first wafer and a second wafer together, the first wafer including a plurality of image sensor chip portions on which color filter arrays and micro lens arrays are sequentially disposed, and a first scribe lane portion surrounding each of the plurality of image sensor chip portions, the second wafer including a plurality of logic chip portions including a plurality of through electrodes, respectively, and a second scribe lane portion surrounding the plurality of logic chip portions;
forming a preliminary dam pattern covering the first scribe lane portion and a portion of an upper surface of the first wafer adjacent to the first scribe lane portion, but not covering the color filter arrays and the micro lens arrays;
positioning a preliminary transparent substrate on the upper surface of the first wafer on which the preliminary dam pattern is formed;
adhering the preliminary dam pattern to the device wafer and the preliminary transparent substrate by performing a laser bonding process of radiating a laser beam to the preliminary dam pattern; and
performing a singulation process forming individual image sensor packages each of which including a transparent substrate, a dam, an image sensor chip portion, and a logic chip portion by cutting the preliminary transparent substrate, the preliminary dam pattern, the first scribe lane portion, and the second scribe lane portion.

### Claim 17 (depends on 16)

The method of claim 16, wherein in the preparing of the device wafer, the plurality of through electrodes are formed to extend from a lower surface of the second wafer into the second wafer, and
wherein the plurality of through electrodes vertically overlap with each of the micro lens arrays and the color filter arrays.

### Claim 18 (depends on 16)

The method of claim 16, wherein each of the image sensor packages comprises an image sensor chip including the image sensor chip portion and a first residual scribe lane portion formed by a portion of the first scribe lane portion and surrounding the image sensor chip portion, and a logic chip including a logic chip portion, and a second residual scribe lane portion formed by a portion of the second scribe lane portion and surrounding the logic chip portion,
wherein a side surface of the transparent substrate, an outer surface of the dam, a side surface of the image sensor chip, and a side surface of the logic chip are in the same vertical plane, and
wherein a width of the dam in a horizontal direction is about 300 μm to about 400 μm.