Electronic component
AssigneeTDK Corporation
InventorsAtsuhiro Tsuyoshi, Takashi Ohtsuka, Kenichi Yoshida
Life of this patent
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Abstract
An electronic component has: a conductor layer M1 formed on a substrate and including lower electrodes of a capacitor; a dielectric film covering the top and side surfaces of each of the lower electrodes; upper electrodes of the capacitor which are formed on the top surfaces of the respective lower electrodes through the dielectric film; and an adhesive film disposed between the dielectric film and the top and side surfaces of each of the lower electrodes. The adhesive film is thus disposed between the dielectric film and the top and side surfaces of each of the lower electrodes.
Claims6
An electronic component comprising:
- a first conductor layer formed on a substrate and including a lower electrode of a capacitor;
- a dielectric film covering top and side surfaces of the lower electrode;
- an upper electrode of the capacitor covering the top surface of the lower electrode with the dielectric film disposed therebetween;
- a first adhesive film disposed between the dielectric film and the top and side surfaces of the lower electrode;
- a first insulating layer formed on the substrate, the first conductor layer and the upper electrode being embedded in the first insulating layer;
- a second conductor layer formed on the first insulating layer and including an inductor pattern;
- and
- a second insulating layer formed on the second insulating layer, the second conductor layer being embedded in the second insulating layer,
- wherein the first adhesive film includes at least one of Ti, Cr, Ta, an oxide thereof, and a nitride thereof,
- wherein the upper electrode has a laminated structure of a seed layer and a plating layer formed on the seed layer, the seed layer includes Ti, Cr, or Ta and being arranged to contact the dielectric film, and
- wherein the electronic component further comprises a second adhesive film being disposed between a part of the dielectric film that covers the side surface of the lower electrode and the first insulating layer, the second adhesive film being formed from a same material as the seed layer.
An electronic component comprising:
- a substrate;
- a lower electrode formed on a substrate, the lower electrode having a laminated structure of a first seed layer and a first plating layer formed on the first seed layer;
- a first adhesive film including a horizontal section formed on a top surface of the lower electrode and a vertical section formed on a side surface of the lower electrode;
- a dielectric film including a horizontal section covering the top surface of the lower electrode via the horizontal section of the first adhesive film and a vertical section covering the side surface of the lower electrode via the vertical section of the first adhesive film;
- an upper electrode covering the top surface of the lower electrode via the horizontal section of the first adhesive film and the horizontal section of the dielectric film, the upper electrode having a laminated structure of a second seed layer and a second plating layer formed on the second seed layer;
- a second adhesive film formed on the vertical section of the dielectric film such that the vertical section of the dielectric film is sandwiched between the vertical section of the first adhesive film and the second adhesive film;
- and
- an insulating layer formed on the substrate so as to embed therein the lower electrode and the upper electrode.
Dependencies are inferred from the claim text.