Match network with switchable variable capacitance
AssigneeAdvanced Energy Industries, Inc.
InventorsDenis Shaw, Masahiro Watanabe
Life of this patent
Estimating the term…
Abstract
A match network with switchable variable capacitance. In one embodiment, a match network includes a first variable capacitance, a second variable capacitance, and a third variable capacitance dynamically connectable in parallel with the first variable capacitance. The match network also includes a controller configured to: control at least one of the first variable capacitance and the second variable capacitance for impedance tuning for a first power pulse; place, in response to a second power pulse, the third variable capacitance to be in parallel with the first variable capacitance; and control at least the third variable capacitance for impedance tuning for the second power pulse.
Claims17
A match network comprising:
- a first variable capacitance that is part of a shunt leg;
- a second variable capacitance that is part of a series leg;
- a third variable capacitance that is part of the shunt leg and is switchably connectable in parallel with the first variable capacitance via a first solid-state switch;
- and
- a controller configured to:
- control at least one of the first variable capacitance and the second variable capacitance for impedance tuning for a first power pulse;
- place, in response to a second power pulse, the third variable capacitance to be in parallel with the first variable capacitance;
- and
- control at least the third variable capacitance for impedance tuning for the second power pulse.
A method comprising:
- providing power, including a first power pulse and a second power pulse, to a dynamic load impedance;
- controlling at least one of a first variable capacitance and a second variable capacitance for impedance tuning for the first power pulse;
- connecting, in response to the second power pulse, a third variable capacitance to be in parallel with the first variable capacitance, wherein the third variable capacitance is switchably connectable in parallel with the first variable capacitance via a first solid-state switch;
- controlling at least the third variable capacitance for impedance tuning for the second power pulse;
- wherein:
- the first variable capacitance is part of a shunt leg;
- the second variable capacitance is part of a series leg;
- and
- the third variable capacitance is part of the shunt leg.
A non-transitory processor-readable medium comprising instructions for execution by a processor or for configuring a field programmable gate array, the instructions comprising instructions to:
- control at least one of a first variable capacitance and a second variable capacitance for impedance tuning for a first power pulse;
- connect, in response to a second power pulse, a third variable capacitance to be in parallel with the first variable capacitance, wherein the third variable capacitance is switchably connectable in parallel with the first variable capacitance via a first solid-state switch;
- control at least the third variable capacitance for impedance tuning for the second power pulse;
- wherein:
- the first variable capacitance is part of a shunt leg;
- the second variable capacitance is part of a series leg;
- and
- the third variable capacitance is part of the shunt leg.
Dependencies are inferred from the claim text.