Multicell or multiarray plasma and method for surface treatment using the same
AssigneesInstitut SystèMes Industriels, Haute Ecole De Suisse Occidentale, Valais-Wallis (Hes-So), Iprint Institute
InventorsFritz Bircher, Christoph Ellert, Alain Germanier, David Martinet, Gilbert Gugler, Sebastian Filliger
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Abstract
Disclosed is a plasma device including at least two plasma cells, and a command unit, wherein the first and the second electrodes of a given plasma cell are independent from the corresponding first and second electrodes of the contiguous plasma cells. The electrodes of contiguous plasma cells are independently connected to the command unit. The command unit includes a high voltage generator and a radiofrequency generator which are mutually protected by a filtering element.
Claims19
Plasma device comprising at least two plasma cells, each plasma cell having a gas inlet comprising a through hole and a core, an internal chamber defined by a lateral wall, and a front wall having a front opening, said gas inlet being connected to a plasma precursor unit, and said front wall comprising a first electrode and a second electrode separated by an insulating layer, the plasma device further comprising a command unit, wherein the first and the second electrodes of a given plasma cell are independent from the corresponding first and second electrodes of the contiguous plasma cells and wherein the first and the second electrodes are independently connected to the command unit and wherein the command unit comprises a high voltage pulse generator and a radiofrequency generator, wherein said high voltage pulse generator and radiofrequency generator are both mutually protected by one or several filtering elements.
A command unit adapted for individually controlling the plasma cells of a plasma cell array, said command unit comprising a high voltage pulse generator, a radiofrequency generator, wherein said high voltage pulse generator and radiofrequency generator are both mutually protected by one or more filtering elements and a connexion means adapted to plug said plasma cell array.
Dependencies are inferred from the claim text.