Workpiece container system

A workpiece container system, comprising:

• a storage assembly that comprises:
• a seat member having:
• a storage portion that defines a longitudinal axis through a geometric center region of the seat member, the storage portion having a workpiece receiving region encompassing the geometric center region and configured to receive a workpiece and support the workpiece from below;
• and
• a pair of flank portions arranged on opposite sides of the storage portion along the longitudinal axis, each flank portion having a thickness thinner than a thickness of the storage portion to generate a step profile near an edge portion of the seat member, a pair of stepped profiles, including the step profile, configured to serve as contact interfaces with a robot arm having a fork-like structure,
• wherein:
• a lower diffuse inducing component for outward diffusion is provided on the storage portion and in the workpiece receiving region, the lower diffuse inducing component allows a diffusion of moisture from inside the storage assembly to outside ambience;
• the lower diffuse inducing component offsets the geometric center region;
• the lower diffuse inducing component comprises a plurality of diffuse port assemblies arranged in the workpiece receiving region around the geometric center region, each of the plurality of diffuse port assemblies comprises a through hole formed on the storage portion;
• and
• when a substrate with a pattern region is received by the workpiece receiving region, all of the plurality of diffuse port assemblies are aligned with the pattern region of the substrate along a vertical direction, with a gap between the plurality of diffuse port assemblies and the pattern region of the substrate;
• and
• a seat cover configured to engage the seat member from above at a periphery region around the workpiece receiving region and configured to cooperatively form an enclosure for housing the workpiece received by the seat member.