# US 12,601,782 B2 · Probe card holder for wafer testing

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- Number: US 12,601,782 B2
- Document ID: US12601782B2
- Status: Granted
- Kind: B2
- Application number: 18/406,329
- Filed: 2024-01-08
- Published: 2025-05-15
- Granted: 2026-04-14
- Earliest claimed: 2023-11-15
- Assignees: Unitest Inc.
- Applicants: Unitest Inc
- Inventors: Dae Kyoung Kim
- Web page: https://patentgrep.com/patent/US12601782B2

## CPC

- G01R 31/2891: {related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05)}
- G01R 1/073: Multiple probes
- G01R 31/2886: {Features relating to contacting the IC under test, e.g. probe heads; chucks (G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06)}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

Proposed is a probe card holder for wafer testing including a first body part (110) provided with a probe card (111) and through guide holes (112) vertically formed around the probe card (111), a second body part (120) provided with a wafer chuck (121) on which a wafer is seated and a magnet holder (122) corresponding to the guide hole (112), a weight ring (130) provided with a magnet chuck (131) that is inserted into the guide hole (112) and fixed with the magnet holder (122) by magnetic force, and assembled with the second body part (120) at a top of the first body part (110), and a clamping part (140) provided between the first body part (110) and the weight ring (130) to hold spacing between the first body part (110) and the weight ring (130).

## Claims

### Claim 1

A probe card holder for wafer testing, comprising:
a first body part provided with a probe card in a center thereof and through guide holes vertically formed around the probe card;
a second body part provided with a wafer chuck in a center thereof on which a wafer is seated and magnet holders corresponding to the guide holes;
a weight ring provided with magnet chucks to be inserted into the guide hole and fixed with the magnet holders by magnetic force, and assembled with the second body part at a top of the first body part; and
a clamping part provided between the first body part and the weight ring to hold spacing between the first body part and the weight ring.

### Claim 2 (depends on 1)

The probe card holder for wafer testing of claim 1, wherein at least two magnet chucks are provided at a lower part of the weight ring.

### Claim 3 (depends on 2)

The probe card holder for wafer testing of claim 2, wherein at least two clamping parts are provided between the first body part and the weight ring.

### Claim 4 (depends on 3)

The probe card holder for wafer testing of claim 3, wherein at least one clamping part is provided between the magnet chucks.

### Claim 5 (depends on 1)

The probe card holder for wafer testing of claim 1, wherein the clamping part comprises:
a shaft with an end thereof fixed to the weight ring or the first body part; and
a pneumatic drive part fixed to the weight ring or the first body part and fixed to the shaft based on a pneumatic signal.

### Claim 6 (depends on 1)

The probe card holder for wafer testing of claim 1, further comprising:
a guide member provided between the first body part and the weight ring to guide an assembly position therebetween.