Field-biased nonlinear optical metrology using corona discharge source
AssigneesSK hynix Inc., FemtoMetrix, Inc.
InventorsSeongmin Ma, Sangmin Kim, Jonghoi Cho, Ming Lei
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Abstract
Various approaches can be used to interrogate a surface such as a surface of a layered semiconductor structure on a semiconductor wafer. Certain approaches employ Second Harmonic Generation while other utilize four wave-mixing or multi-wave mixing. Corona discharge may be applied to the sample to provide additional information. Some approaches involve determining current flow from a sample illuminated with radiation.
Claims22
A method of optical interrogation of a sample having a top side and a bottom side, the method comprising:
- applying optical radiation from a optical source to a surface of the sample;
- depositing electrical charge on the top side of the sample using a corona gun;
- measuring an electrical current between the bottom side of the sample and an electrical ground using an ammeter to determine an amount of the electrical charge deposited, said measured electrical current induced by the electrical charge deposited on the top side of the sample;
- determining the amount of electrical charge deposited on the top side of the sample based on the measured electrical current;
- detecting using an optical detector, a variation in Second Harmonic Generation (SHG) effect signals generated by the optical radiation for different amounts of electrical charge deposited on the top side of the sample;
- and
- determining a characteristic of the variation of the detected SHG effect signals in the presence of the optical radiation and the determined amount of electrical charge deposited on the top side of the sample.
A system for optically interrogating a surface of a sample having a top side and a bottom side accompanied by application of electric charge to said top side of the sample, said system comprising:
- an optical source configured to emit optical radiation, said optical source disposed so as to direct said optical radiation onto said surface of said sample;
- a corona discharge source disposed with respect to the sample to provide different amounts of electric charge on the top side of the sample;
- an optical detector configured to detect a variation in second harmonic generated light from the sample in the presence of the optical radiation and the different amounts of electrical charge;
- a conductive chuck configured to support the sample and be in contact with the bottom side of the sample;
- an ammeter connected between an electrical ground and said conductive chuck;
- and
- electronics configured to:
- determine an amount of electrical charge deposited on the top side of the sample based on an electrical current between the bottom side of the conductive chuck and the electrical ground measured using the ammeter, said electrical current induced by the electrical charge deposited on the top side of the sample.
A system for optically interrogating a surface of a sample having a top side and a bottom side accompanied by application of electric charge to said sample, said system comprising:
- a first optical source configured to emit a first incident beam of light towards said surface of said sample;
- a second optical source configured to emit a second incident beam of light towards said surface of said sample, wherein the first incident beam overlaps with the second incident beam on the sample to generate at least one non-holographic four-wave mixing or multi-wave mixing signal component via a nonlinear optical interaction with the sample;
- a corona discharge source disposed with respect to the sample to provide electric charge on the top side of the sample;
- an optical detection system configured to receive the at least one non-holographic four-wave mixing or multi-wave mixing signal component and detect a variation in at least one non-holographic four-wave mixing signal component or at least one non-holographic multi-wave mixing signal component from a portion of the sample illuminated by the first and the second incident beams of light for different amounts of electrical charge deposited on said portion of the sample;
- and
- electronics electrically connected to said optical detection system to receive a signal based on said detected variation in at least one non-holographic four-wave mixing signal component or at least one non-holographic multi-wave mixing signal component.
A method of optical interrogation of a sample having a top side and a bottom side, the method comprising:
- directing a first incident beam from a first optical source towards a region on a surface of the sample;
- directing a second incident beam from a second optical source towards the region on the surface of the sample, wherein the first incident beam overlaps with the second incident beam on the sample to generate at least one non-holographic four-wave mixing or multi-wave mixing signal component via a nonlinear optical interaction with the sample;
- depositing electrical charge on the top side of the sample using a corona gun;
- and
- detecting using an optical detection system, a variation in at least one non-holographic four-wave mixing signal component or at least one non-holographic multi-wave mixing signal component from a portion of the top side of the sample generated by the first incident beam and the second incident beam for different amounts of the electrical charge deposited on said portion of the top side of the sample.
Dependencies are inferred from the claim text.