MEMS device and inertial measurement unit

Abstract

A MEMS device of an embodiment includes a substrate, fixed electrode portions, a movable body, fixed electrode fixing portions, a wiring structure, and a first wire. The fixed electrode portions are fixed relative to the substrate. The movable body is movable relative to the substrate. The fixed electrode fixing portions are electrically coupled to the fixed electrode portions. The wiring structure is provided in the same layer as those of the movable body and the fixed electrode portions with respect to the substrate. The first wire has one end coupled to the fixed electrode fixing portion. The wiring structure is at least provided in an opening part of the movable body, and the first wire is wired on the wiring structure via an insulating film and routed out of the movable body through the opening part of the movable body.

Dependencies are inferred from the claim text.