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US 12,601,678 B2Granted
Complex gas sensor, method for manufacturing same, and method for controlling complex gas sensor
AssigneeIndustry-University Cooperation Foundation Hanyang University Erica
InventorsYong-Ho Choa, Han Kim, Byungkwon Jang, Ji Young Park, Min Seob Lim
Life of this patent
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Abstract
The present disclosure relates to a gas sensor using photo-active energy and capacitance, and provides a complex gas sensor including a light source configured to irradiate light, and a gas detection part in which adsorption of a target gas is promoted by the light and whose capacitance changes according to the adsorption of the target gas.
Claims19
A complex gas sensor comprising:
- a light source configured to irradiate light;
- and
- a gas detection part in which adsorption of a target gas is promoted by the light and whose capacitance changes according to the adsorption of the target gas,
- wherein the gas detection part comprises a photo-active part comprising quantum dot that absorbs energy of the light and promotes polarization in a sensing part.
1 more element
A method of manufacturing a complex gas sensor, the method comprising:
- preparing a porous structure;
- forming a top electrode on an upper surface of the porous structure such that one region of the upper surface of the porous structure is exposed;
- forming a bottom electrode on a lower surface of the porous structure;
- forming a sensitive part configure to adsorb and desorb a target gas in the exposed region of the upper surface of the porous structure;
- and
- providing a light source configured to irradiate light to at least a portion of the sensitive part,
- wherein the forming of the sensitive part includes:
- preparing a sensitive material in which the adsorption of the target gas is promoted by light energy irradiated from the light source;
- preparing a source solution by mixing a solvent with the sensitive material;
- and
- providing the source solution to the exposed region of the upper surface of the porous structure while the porous structure is heat-treated.
8 more elements
A complex gas sensor comprising:
- a light source configured to irradiate light;
- and
- a gas detection part of which capacitance changes according to adsorption of a target gas,
- wherein the gas detection part includes:
- a sensitive composite including a sensing part configured to adsorb the target gas and a photo-active part configured to promote the adsorption of the target gas of the sensing part by light energy supplied from the light source;
- a top electrode surrounding the sensitive composite;
- a bottom electrode facing the top electrode;
- and
- a porous structure disposed between the top electrode and the bottom electrode,
- wherein the photo-active part comprises quantum dot that absorbs the light energy and promotes polarization in the sensing part.
7 more elements
Dependencies are inferred from the claim text.