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US 12,601,650 B2Granted
Pressure sensor device having an oscillator including a membrane deformable to ambient differential pressure
AssigneeMurata Manufacturing Co., Ltd.
InventorHiroaki Nishikawa
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Abstract
A pressure sensor device includes a base including joint portions to join to a mounting substrate, and an oscillator to oscillate with respect to the base. The oscillator includes a capacitor including a membrane that is deformable in accordance with an ambient pressure difference as a sensor electrode and a facing electrode spaced apart from the membrane. The membrane does not overlap the base in plan view in a direction orthogonal or substantially orthogonal to the membrane.
Claims18
A pressure sensor device comprising:
- a base including a joint portion to mount the base;
- and
- an oscillator to oscillate with respect to the base;
- wherein
- the oscillator includes a membrane that is deformable in accordance with an ambient pressure difference as a sensor electrode;
- and
- the membrane does not overlap the base in a plan view in a direction orthogonal or substantially orthogonal to the membrane.
4 more elements
Dependencies are inferred from the claim text.