Powder protecting three-way valve with cylindrical heating element
AssigneeAotech Co.,Ltd.
InventorSeung Yong Lee
Life of this patent
Estimating the term…
Abstract
A powder protecting three-way valve installed in a line of a semiconductor or flat panel display manufacturing apparatus to control flow of reaction by-product gas, includes: a valve casing comprising an inlet pipe through which the reaction by-product gas flows in and a plurality of outlet pipes through which the inflowing reaction by-product gas flows out in different directions; a rotating ball which is rotatably installed inside the valve casing and comprises an inlet hole communicating with the inlet pipe of the valve casing and outlet holes selectively communicating with the plurality of outlet pipes of the valve casing to control a direction of the flow of the reaction by-product gas; and a heating element installed in the valve casing to heat the inside of the valve casing.
Claims9
A powder protecting three-way valve installed in a line of a semiconductor or flat panel display manufacturing apparatus to control flow of reaction by-product gas, the powder protecting three-way valve comprising:
- a valve casing comprising an inlet pipe through which the reaction by-product gas flows in and a plurality of outlet pipes through which the inflowing reaction by-product gas flows out in different directions;
- a rotating ball which is rotatably installed inside the valve casing and comprises an inlet hole communicating with the inlet pipe of the valve casing and outlet holes selectively communicating with the plurality of outlet pipes of the valve casing to control a direction of the flow of the reaction by-product gas;
- and
- a heating unit installed in the valve casing and configured to heat an inside of the valve casing,
- wherein the heating unit comprises a plurality of cylindrical heaters respectively accommodated in corresponding circular and elongated storage pockets formed near corner regions on one side of the valve casing, each storage pocket being formed in a direction perpendicular to the inlet pipe and passing through upper and lower side portions near the inlet pipe and upper and lower side portions near an outlet pipe disposed in line with the inlet pipe among the plurality of outlet pipes, and each cylindrical heater being detachably inserted into corresponding storage pocket and disposed at multiple circumferential positions around the rotating ball to heat the inside of the valve casing.
A powder protecting three-way valve installed in a line of a semiconductor or flat panel display manufacturing apparatus to control flow of reaction by-product gas, the powder protecting three-way valve comprising:
- a valve casing comprising an inlet pipe through which the reaction by-product gas flows in and a plurality of outlet pipes through which the inflowing reaction by-product gas flows out in different directions;
- a rotating ball which is rotatably installed inside the valve casing and comprises an inlet hole communicating with the inlet pipe of the valve casing and outlet holes selectively communicating with the plurality of outlet pipes of the valve casing to control a direction of the flow of the reaction by-product gas;
- a heating unit installed in the valve casing and configured to heat an inside of the valve casing, wherein the heating unit comprises a plurality of cylindrical heaters respectively accommodated in corresponding circular and elongated storage pockets formed near corner regions on one side of the valve casing, and each cylindrical heater being detachably inserted into corresponding storage pocket and disposed at multiple circumferential positions around the rotating ball to heat the inside of the valve casing;
- and
- a plurality of pocket covers which are bolted to the one side of the valve casing, each of the plurality of pocket covers covering an entrance of each storage pocket to prevent each cylindrical heater stored in each storage pocket from being separated and being provided with a wire extraction hole which allows extraction of an electric wire wound on each cylindrical heater.
Dependencies are inferred from the claim text.